@inproceedings{bd37f21bed534a8da678723fc83d9be7,
title = "Interface Characterization of Metals and Metal-nitrides to Phase Change Materials",
abstract = "We have investigated the interfacial contact properties of the CMOS compatible electrode materials W, TiW, Ta, TaN and TiN to doped-Sb2Te phase change material (PCM). This interface is characterized both in the amorphous and in the crystalline state of the doped-Sb2Te. The electrical nature of the interface is characterized by contact resistance measurements and is expressed in terms of specific interfacial contact resistance (ϿC). These measurements are performed on four-terminal Kelvin Resistor test structures. Knowledge of the ϿC is useful for selection of the electrode in the integration and optimization of the phase change memory cells.",
keywords = "METIS-285045, EWI-21355, IR-79894",
author = "Deepu Roy and Gravesteijn, {Dirk J} and Wolters, {Robertus A.M.}",
note = "10.1557/opl.2011.978 ; null ; Conference date: 25-04-2011 Through 29-04-2011",
year = "2011",
month = apr,
day = "25",
doi = "10.1557/opl.2011.978",
language = "Undefined",
isbn = "not assigned",
series = "MRS proceedings",
publisher = "Cambridge University Press",
pages = "q03--02",
booktitle = "Proceedings of 2011 MRS Spring Meeting",
address = "United Kingdom",
}