Interface study of Mo/Si systems using LEIS and in-situ stress analysis

Johan Reinink, Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Frederik Bijkerk (Contributor)

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Publication statusPublished - 19 Oct 2017

Cite this

@conference{680a56232cf14bd2bd97cc5e82a1f85d,
title = "Interface study of Mo/Si systems using LEIS and in-situ stress analysis",
author = "Johan Reinink and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Frederik Bijkerk",
year = "2017",
month = "10",
day = "19",
language = "English",

}

TY - CONF

T1 - Interface study of Mo/Si systems using LEIS and in-situ stress analysis

AU - Reinink, Johan

A2 - van de Kruijs, Robbert Wilhelmus Elisabeth

A2 - Bijkerk, Frederik

PY - 2017/10/19

Y1 - 2017/10/19

M3 - Poster

ER -