Interface study of Mo/Si systems using LEIS and in-situ stress analysis

Johan Reinink, Robbert Wilhelmus Elisabeth van de Kruijs (Contributor), Frederik Bijkerk (Contributor)

Research output: Contribution to conferencePosterOther research output

Original languageEnglish
Publication statusPublished - 19 Oct 2017
Event304. PTB-Seminar VUV and EUV Metrology - Berlin, Germany
Duration: 19 Oct 201720 Oct 2017

Seminar

Seminar304. PTB-Seminar VUV and EUV Metrology
CountryGermany
CityBerlin
Period19/10/1720/10/17

Cite this