Interface study of Mo/Si systems using LEIS and in-situ stress analysis

Research output: Contribution to conference › Poster › Other research output

Original language	English
Publication status	Published - 19 Oct 2017
Event	304. PTB-Seminar VUV and EUV Metrology - Berlin, Germany Duration: 19 Oct 2017 → 20 Oct 2017

Seminar	304. PTB-Seminar VUV and EUV Metrology
Country/Territory	Germany
City	Berlin
Period	19/10/17 → 20/10/17

Cite this

@conference{680a56232cf14bd2bd97cc5e82a1f85d,

title = "Interface study of Mo/Si systems using LEIS and in-situ stress analysis",

author = "Johan Reinink and {van de Kruijs}, {Robbert Wilhelmus Elisabeth} and Frederik Bijkerk",

year = "2017",

month = oct,

day = "19",

language = "English",

note = "304. PTB-Seminar VUV and EUV Metrology ; Conference date: 19-10-2017 Through 20-10-2017",

}