Interfacing of artificial hairs array for complex flow pattern recognition

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    In this paper we report on the latest developments in characterising and interfacing biomimetic flow-sensor array based on the flow sensitive mechano-sensors of crickets. Capacitive hair sensors have been fabricated using a surface micromachining technology and implemented to detect air flows. We have realized readout electronics to detect the movements capacitively using electrodes integrated on the membrane. A charge amplifier, which produces an output voltage representing the capacitance variation of the selected sensor, is used to pick up the signal. An array of hair sensors is implemented for better and more representative flow signals compared to single sensor measurement. Different schemes for measuring individual sensors in arrays independently are discussed. Frequency Division Multiplexing is found to be efficient for this purpose individual element measurement. Key Words: Artificial hairs, capacitive readout, FDM
    Original languageUndefined
    Title of host publicationMicromechanics Europe Workshop 2008
    Place of PublicationAachen
    PublisherRWTH Aachen University
    Number of pages4
    ISBN (Print)978-3-00-025529-8
    Publication statusPublished - 28 Sept 2008
    Event19th MicroMechanics Europe Workshop, MME 2008 - Aachen, Germany
    Duration: 28 Sept 200830 Sept 2008
    Conference number: 19

    Publication series

    PublisherRWTH Aachen University


    Workshop19th MicroMechanics Europe Workshop, MME 2008
    Abbreviated titleMME


    • TST-Life like
    • METIS-255420
    • IR-65233
    • EWI-14649

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