Abstract
In this paper we report on the latest developments in characterising and interfacing biomimetic flow-sensor array based on the flow sensitive mechano-sensors of crickets. Capacitive hair sensors have been fabricated using a surface micromachining technology and implemented to detect air flows. We have realized readout electronics to detect the movements capacitively using electrodes integrated on the membrane. A charge amplifier, which produces an output voltage representing the capacitance variation of the selected sensor, is used to pick up the signal. An array of hair sensors is implemented for better and more representative flow signals compared to single sensor measurement. Different schemes for measuring individual sensors in arrays independently are discussed. Frequency Division Multiplexing is found to be efficient for this purpose individual element measurement.
Key Words: Artificial hairs, capacitive readout, FDM
| Original language | Undefined |
|---|---|
| Title of host publication | Micromechanics Europe Workshop 2008 |
| Place of Publication | Aachen |
| Publisher | RWTH Aachen University |
| Pages | 129-132 |
| Number of pages | 4 |
| ISBN (Print) | 978-3-00-025529-8 |
| Publication status | Published - 28 Sept 2008 |
| Event | 19th MicroMechanics Europe Workshop, MME 2008 - Aachen, Germany Duration: 28 Sept 2008 → 30 Sept 2008 Conference number: 19 |
Publication series
| Name | |
|---|---|
| Publisher | RWTH Aachen University |
Workshop
| Workshop | 19th MicroMechanics Europe Workshop, MME 2008 |
|---|---|
| Abbreviated title | MME |
| Country/Territory | Germany |
| City | Aachen |
| Period | 28/09/08 → 30/09/08 |
Keywords
- TST-Life like
- METIS-255420
- IR-65233
- EWI-14649