Interfacing of differential-capacitive biomimetic hair flow-sensors for optimal sensitivity

A.M.K. Dagamseh, C.M. Bruinink, Remco J. Wiegerink, Theodorus S.J. Lammerink, H. Droogendijk, Gijsbertus J.M. Krijnen

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    Biologically inspired sensor-designs are investigated as a possible path to surpass the performance of more traditionally engineered designs. Inspired by crickets, artificial hair sensors have shown the ability to detect minute flow signals. This paper addresses developments in the design, fabrication, interfacing and characterization of biomimetic hair flow-sensors towards sensitive high-density arrays. Improvement of the electrode design of the hair sensors has resulted in a reduction of the smallest hair movements that can be measured. In comparison to the arrayed hairs-sensor design, the detection-limit was arguably improved at least twelve-fold, down to 1 mm s–1 airflow amplitude at 250 Hz as measured in a bandwidth of 3 kHz. The directivity pattern closely resembles a figure-of-eight. These sensitive hair-sensors open possibilities for high-resolution spatio-temporal flow pattern observations.
    Original languageUndefined
    Pages (from-to)035010
    Number of pages16
    JournalJournal of micromechanics and microengineering
    Issue number3
    Publication statusPublished - Mar 2013


    • EWI-23033
    • TST-Life like
    • METIS-296283
    • IR-84097
    • Biomimetic flow sensors
    • Artificial Hair Sensors

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