TY - GEN
T1 - Intergrated micro-liquid dosing system
AU - Lammerink, Theodorus S.J.
AU - Elwenspoek, Michael Curt
AU - Fluitman, J.H.J.
PY - 1993/2/7
Y1 - 1993/2/7
N2 - A new concept for micro-mixing of liquid is introduced and feasibility is demonstrated. The mixer allows fast mixing of small amounts of two liquids and it is application to micro-liquid handling systems [1]. The mixer has a channel for the liquid, an inlet port for the reagent, and a 2.2 mm × 2 mm × 330 μm mixing area, and its bottom has 400 micro-nozzles (15 μm × 15 μm). Through these nozzles, a reagent is injected into the sample liquid, making many micro-plumes. These plumes increase the contact surface between the two liquids drastically, and hasten the speed of the mixing by diffusion. The nozzle holes and channel are etched using KOH into a 3-inch (100)-Si wafer from both sides. The fabrication process is extremely simple. Flow visualization by microscope shows the mixing is complete within a few seconds, and absorptiometry using a pair of optical fibers showed that a homogeneous state of mixing is reached in 1.2 seconds, when the total volume injected is 0.5 μl and the injection flow rate is 0.75 μVs.
AB - A new concept for micro-mixing of liquid is introduced and feasibility is demonstrated. The mixer allows fast mixing of small amounts of two liquids and it is application to micro-liquid handling systems [1]. The mixer has a channel for the liquid, an inlet port for the reagent, and a 2.2 mm × 2 mm × 330 μm mixing area, and its bottom has 400 micro-nozzles (15 μm × 15 μm). Through these nozzles, a reagent is injected into the sample liquid, making many micro-plumes. These plumes increase the contact surface between the two liquids drastically, and hasten the speed of the mixing by diffusion. The nozzle holes and channel are etched using KOH into a 3-inch (100)-Si wafer from both sides. The fabrication process is extremely simple. Flow visualization by microscope shows the mixing is complete within a few seconds, and absorptiometry using a pair of optical fibers showed that a homogeneous state of mixing is reached in 1.2 seconds, when the total volume injected is 0.5 μl and the injection flow rate is 0.75 μVs.
KW - EWI-14153
KW - METIS-114076
KW - IR-17181
U2 - 10.1109/MEMSYS.1993.296913
DO - 10.1109/MEMSYS.1993.296913
M3 - Conference contribution
SN - 0-7803-0958-8
SP - 254
EP - 259
BT - Proceedings of the 1993 IEEE Micro Electro Mechanical Systems - MEMS
PB - IEEE
CY - Piscataway
T2 - IEEE Workshop on Micro Electro Mechanical Systems, MEMS 1993
Y2 - 7 February 1993 through 10 February 1993
ER -