Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

Jeroen Bosgra

Research output: ThesisPhD Thesis - Research external, graduation UT

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Abstract

The research described in this thesis is on Mo/Si based multilayer mirror structures. Two important topics in this field are increase of reflection and improvement of thermal stability. The "standard" Mo/Si multilayer structure in theory can reflect about 75% of the incoming 13.5 nm radiation. However, interlayer formation during deposition and roughness of the interfaces reduce the reflection of deposited multilayer structures. To further improve the multilayer structures, a better understanding of interdiffusion effects at the interfaces is required.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bijkerk, Fred, Supervisor
  • Yakshin, Andrey , Co-Supervisor
Award date4 Jul 2013
Place of PublicationEnschede
Publisher
Print ISBNs9789461917942
Publication statusPublished - 4 Jul 2013

Keywords

  • IR-89206
  • METIS-299380

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