Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

Jeroen Bosgra

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

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Abstract

The research described in this thesis is on Mo/Si based multilayer mirror structures. Two important topics in this field are increase of reflection and improvement of thermal stability. The "standard" Mo/Si multilayer structure in theory can reflect about 75% of the incoming 13.5 nm radiation. However, interlayer formation during deposition and roughness of the interfaces reduce the reflection of deposited multilayer structures. To further improve the multilayer structures, a better understanding of interdiffusion effects at the interfaces is required.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Bijkerk, Fred, Supervisor
  • Yakshin, Andrey , Co-Supervisor
Award date4 Jul 2013
Place of PublicationEnschede
Publisher
Print ISBNs9789461917942
Publication statusPublished - 4 Jul 2013

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laminates
interlayers
thermodynamics
theses
radiation
thermal stability
roughness

Keywords

  • IR-89206
  • METIS-299380

Cite this

Bosgra, Jeroen. / Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation. Enschede : University of Twente, 2013. 124 p.
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Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation. / Bosgra, Jeroen.

Enschede : University of Twente, 2013. 124 p.

Research output: ThesisPhD Thesis - Research external, graduation UTAcademic

TY - THES

T1 - Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

AU - Bosgra, Jeroen

N1 - promotiepremie 100% LPNO

PY - 2013/7/4

Y1 - 2013/7/4

N2 - The research described in this thesis is on Mo/Si based multilayer mirror structures. Two important topics in this field are increase of reflection and improvement of thermal stability. The "standard" Mo/Si multilayer structure in theory can reflect about 75% of the incoming 13.5 nm radiation. However, interlayer formation during deposition and roughness of the interfaces reduce the reflection of deposited multilayer structures. To further improve the multilayer structures, a better understanding of interdiffusion effects at the interfaces is required.

AB - The research described in this thesis is on Mo/Si based multilayer mirror structures. Two important topics in this field are increase of reflection and improvement of thermal stability. The "standard" Mo/Si multilayer structure in theory can reflect about 75% of the incoming 13.5 nm radiation. However, interlayer formation during deposition and roughness of the interfaces reduce the reflection of deposited multilayer structures. To further improve the multilayer structures, a better understanding of interdiffusion effects at the interfaces is required.

KW - IR-89206

KW - METIS-299380

M3 - PhD Thesis - Research external, graduation UT

SN - 9789461917942

PB - University of Twente

CY - Enschede

ER -