Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

Jeroen Bosgra

doi:10.3990/1.9789461917942

Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

Jeroen Bosgra

Research output: Thesis › PhD Thesis - Research external, graduation UT

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Abstract

The research described in this thesis is on Mo/Si based multilayer mirror structures. Two important topics in this field are increase of reflection and improvement of thermal stability. The "standard" Mo/Si multilayer structure in theory can reflect about 75% of the incoming 13.5 nm radiation. However, interlayer formation during deposition and roughness of the interfaces reduce the reflection of deposited multilayer structures. To further improve the multilayer structures, a better understanding of interdiffusion effects at the interfaces is required.

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Bijkerk, Fred, Supervisor Yakshin, Andrey, Co-Supervisor
Award date	4 Jul 2013
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	978-94-6191-794-2
DOIs	https://doi.org/10.3990/1.9789461917942
Publication status	Published - 4 Jul 2013

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PhD thesis J. BosgraFinal published version, 8.31 MB

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title = "Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation",

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N2 - The research described in this thesis is on Mo/Si based multilayer mirror structures. Two important topics in this field are increase of reflection and improvement of thermal stability. The "standard" Mo/Si multilayer structure in theory can reflect about 75% of the incoming 13.5 nm radiation. However, interlayer formation during deposition and roughness of the interfaces reduce the reflection of deposited multilayer structures. To further improve the multilayer structures, a better understanding of interdiffusion effects at the interfaces is required.

AB - The research described in this thesis is on Mo/Si based multilayer mirror structures. Two important topics in this field are increase of reflection and improvement of thermal stability. The "standard" Mo/Si multilayer structure in theory can reflect about 75% of the incoming 13.5 nm radiation. However, interlayer formation during deposition and roughness of the interfaces reduce the reflection of deposited multilayer structures. To further improve the multilayer structures, a better understanding of interdiffusion effects at the interfaces is required.

U2 - 10.3990/1.9789461917942

DO - 10.3990/1.9789461917942

M3 - PhD Thesis - Research external, graduation UT

SN - 978-94-6191-794-2

PB - University of Twente

CY - Enschede

ER -

Interlayer thermodynamics in nanoscale layered structures for reflection of EUV radiation

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