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Intermixing and thermal oxidation of ZrO2 thin films grown on a-Si, SiN, and SiO2 by metallic and oxidic mode magnetron sputtering
R. Coloma Ribera, Robbert W.E. van de Kruijs, Marko Sturm, Andrey Yakshin, Fred Bijkerk
Research output: Contribution to journal › Article › Academic › peer-review
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