Abstract
Advanced epitaxial technology has been combined with straightforward, conventional processing to fabricate an emitter-down/collector-up SiGe HBT with both high performance and low-cost potentials. Particularly the fmax is enhanced by the minimization of the collector-base capacitance.
Original language | English |
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Title of host publication | 27th European Solid-State Device Research Conference 1997 |
Editors | H. Grunbacher |
Place of Publication | Piscataway, NJ |
Publisher | IEEE |
Pages | 540-543 |
Number of pages | 4 |
ISBN (Print) | 2-86332-221-4 |
DOIs | |
Publication status | Published - 1 Jan 1997 |
Externally published | Yes |
Event | 27th European Solid-State Device Research Conference, ESSDERC 1997 - Stuttgart, Germany Duration: 22 Sept 1997 → 24 Sept 1997 Conference number: 27 |
Conference
Conference | 27th European Solid-State Device Research Conference, ESSDERC 1997 |
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Abbreviated title | ESSDERC 1997 |
Country/Territory | Germany |
City | Stuttgart |
Period | 22/09/97 → 24/09/97 |