Inverse-woodpile photonic band gap crystals with a cubic diamond-like structure made from single-crystalline silicon

J. M. Van Den Broek, L. A. Woldering, R. W. Tjerkstra, F. B. Segerink, I. D. Setija, W. L. Vos

Research output: Contribution to journalArticleAcademicpeer-review

27 Citations (Scopus)

Abstract

Three dimensional photonic band gap crystals with a cubic diamond-like symmetry are fabricated. These so-called inverse-woodpile nanostructures consist of two perpendicular sets of pores in single-crystal silicon wafers and are made by means of complementary metal oxide-semiconductor (CMOS)-compatible methods. Both sets of pores have high aspect ratios and are made by deep reactive-ion etching. The mask for the first set of pores is defined in chromium by means of deep UV scan-and-step technology. The mask for the second set of pores is patterned using an ion beam and carefully placed at an angle of 90°with an alignment precision of better than 30 nm. Crystals are made with pore radii between 135-186 nm with lattice parameters a = 686 and c = 488 nm such that a/c = √2; hence the structure is cubic. The crystals are characterized using scanning electron microscopy and X-ray diffraction. By milling away slices of crystal, the pores are analyzed in detail in both directions regarding depth, radius, tapering, shape, and alignment. Using optical reflectivity it is demonstrated that the crystals have broad reflectivity peaks in the near-infrared frequency range, which includes the telecommunication range. The strong reflectivity confirms the high quality of the photonic crystals. Furthermore the width of the reflectivity peaks agrees well with gaps in calculated photonic band structures.

Original languageEnglish
Pages (from-to)25-31
Number of pages7
JournalAdvanced functional materials
Volume22
Issue number1
DOIs
Publication statusPublished - 11 Jan 2012

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Photonic band gap
Diamond
Silicon
Diamonds
diamonds
photonics
Crystalline materials
porosity
Crystals
silicon
crystals
reflectance
Masks
masks
alignment
Reactive ion etching
Crystal symmetry
Chromium
Photonic crystals
radii

Keywords

  • UT-Hybrid-D
  • optical reflectivity
  • photonic crystals
  • porous materials
  • diamond-like structures

Cite this

Van Den Broek, J. M. ; Woldering, L. A. ; Tjerkstra, R. W. ; Segerink, F. B. ; Setija, I. D. ; Vos, W. L. / Inverse-woodpile photonic band gap crystals with a cubic diamond-like structure made from single-crystalline silicon. In: Advanced functional materials. 2012 ; Vol. 22, No. 1. pp. 25-31.
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abstract = "Three dimensional photonic band gap crystals with a cubic diamond-like symmetry are fabricated. These so-called inverse-woodpile nanostructures consist of two perpendicular sets of pores in single-crystal silicon wafers and are made by means of complementary metal oxide-semiconductor (CMOS)-compatible methods. Both sets of pores have high aspect ratios and are made by deep reactive-ion etching. The mask for the first set of pores is defined in chromium by means of deep UV scan-and-step technology. The mask for the second set of pores is patterned using an ion beam and carefully placed at an angle of 90°with an alignment precision of better than 30 nm. Crystals are made with pore radii between 135-186 nm with lattice parameters a = 686 and c = 488 nm such that a/c = √2; hence the structure is cubic. The crystals are characterized using scanning electron microscopy and X-ray diffraction. By milling away slices of crystal, the pores are analyzed in detail in both directions regarding depth, radius, tapering, shape, and alignment. Using optical reflectivity it is demonstrated that the crystals have broad reflectivity peaks in the near-infrared frequency range, which includes the telecommunication range. The strong reflectivity confirms the high quality of the photonic crystals. Furthermore the width of the reflectivity peaks agrees well with gaps in calculated photonic band structures.",
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Inverse-woodpile photonic band gap crystals with a cubic diamond-like structure made from single-crystalline silicon. / Van Den Broek, J. M.; Woldering, L. A.; Tjerkstra, R. W.; Segerink, F. B.; Setija, I. D.; Vos, W. L.

In: Advanced functional materials, Vol. 22, No. 1, 11.01.2012, p. 25-31.

Research output: Contribution to journalArticleAcademicpeer-review

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T1 - Inverse-woodpile photonic band gap crystals with a cubic diamond-like structure made from single-crystalline silicon

AU - Van Den Broek, J. M.

AU - Woldering, L. A.

AU - Tjerkstra, R. W.

AU - Segerink, F. B.

AU - Setija, I. D.

AU - Vos, W. L.

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N2 - Three dimensional photonic band gap crystals with a cubic diamond-like symmetry are fabricated. These so-called inverse-woodpile nanostructures consist of two perpendicular sets of pores in single-crystal silicon wafers and are made by means of complementary metal oxide-semiconductor (CMOS)-compatible methods. Both sets of pores have high aspect ratios and are made by deep reactive-ion etching. The mask for the first set of pores is defined in chromium by means of deep UV scan-and-step technology. The mask for the second set of pores is patterned using an ion beam and carefully placed at an angle of 90°with an alignment precision of better than 30 nm. Crystals are made with pore radii between 135-186 nm with lattice parameters a = 686 and c = 488 nm such that a/c = √2; hence the structure is cubic. The crystals are characterized using scanning electron microscopy and X-ray diffraction. By milling away slices of crystal, the pores are analyzed in detail in both directions regarding depth, radius, tapering, shape, and alignment. Using optical reflectivity it is demonstrated that the crystals have broad reflectivity peaks in the near-infrared frequency range, which includes the telecommunication range. The strong reflectivity confirms the high quality of the photonic crystals. Furthermore the width of the reflectivity peaks agrees well with gaps in calculated photonic band structures.

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