Investigating EUV degradation with in-situ EUV transmission measurements

Research output: Contribution to conferencePosterAcademic

Abstract

Material degradation in EUV is not yet fully understood due to the dependence on its electronic structure. We investigate the degradation of transition metal (TM) oxide (TMO) cap layers during EUV exposure. We hypothesize oxygen release from a TMO due to Auger decay, oxidizing the underlayer (SiNx), if a TM atom has no free valence electrons (VE). Inversely a TM atom with free VE is stable in EUV.
Original languageEnglish
Number of pages1
Publication statusPublished - 12 Dec 2024
Event16th BESSY@HZB User Meeting 2024 - Berlin, Germany
Duration: 11 Dec 202412 Dec 2024
Conference number: 16

Conference

Conference16th BESSY@HZB User Meeting 2024
Country/TerritoryGermany
CityBerlin
Period11/12/2412/12/24

Keywords

  • Extreme ultraviolet (EUV)
  • Transition metal oxides
  • Auger decay
  • EUV lithography

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