Investigating EUV degradation with in-situ EUV transmission measurements

Duncan Ceylan Ramsamoedj; Marcelo Ackermann; Wesley van den Beld

Investigating EUV degradation with in-situ EUV transmission measurements

Duncan Ceylan Ramsamoedj, Marcelo Ackermann, Wesley van den Beld

Research output: Contribution to conference › Poster › Academic

Abstract

Material degradation in EUV is not yet fully understood due to the dependence on its electronic structure. We investigate the degradation of transition metal (TM) oxide (TMO) cap layers during EUV exposure. We hypothesize oxygen release from a TMO due to Auger decay, oxidizing the underlayer (SiNx), if a TM atom has no free valence electrons (VE). Inversely a TM atom with free VE is stable in EUV.

Original language	English
Number of pages	1
Publication status	Published - 12 Dec 2024
Event	16th BESSY@HZB User Meeting 2024 - Berlin, Germany Duration: 11 Dec 2024 → 12 Dec 2024 Conference number: 16

Conference

Conference	16th BESSY@HZB User Meeting 2024
Country/Territory	Germany
City	Berlin
Period	11/12/24 → 12/12/24

Keywords

Extreme ultraviolet (EUV)
Transition metal oxides
Auger decay
EUV lithography

Cite this

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title = "Investigating EUV degradation with in-situ EUV transmission measurements",

abstract = "Material degradation in EUV is not yet fully understood due to the dependence on its electronic structure. We investigate the degradation of transition metal (TM) oxide (TMO) cap layers during EUV exposure. We hypothesize oxygen release from a TMO due to Auger decay, oxidizing the underlayer (SiNx), if a TM atom has no free valence electrons (VE). Inversely a TM atom with free VE is stable in EUV.",

keywords = "Extreme ultraviolet (EUV), Transition metal oxides, Auger decay, EUV lithography",

author = "Ramsamoedj, {Duncan Ceylan} and Marcelo Ackermann and {van den Beld}, Wesley",

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note = "16th BESSY@HZB User Meeting 2024 ; Conference date: 11-12-2024 Through 12-12-2024",

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T1 - Investigating EUV degradation with in-situ EUV transmission measurements

AU - Ramsamoedj, Duncan Ceylan

AU - Ackermann, Marcelo

AU - van den Beld, Wesley

N1 - Conference code: 16

PY - 2024/12/12

Y1 - 2024/12/12

N2 - Material degradation in EUV is not yet fully understood due to the dependence on its electronic structure. We investigate the degradation of transition metal (TM) oxide (TMO) cap layers during EUV exposure. We hypothesize oxygen release from a TMO due to Auger decay, oxidizing the underlayer (SiNx), if a TM atom has no free valence electrons (VE). Inversely a TM atom with free VE is stable in EUV.

AB - Material degradation in EUV is not yet fully understood due to the dependence on its electronic structure. We investigate the degradation of transition metal (TM) oxide (TMO) cap layers during EUV exposure. We hypothesize oxygen release from a TMO due to Auger decay, oxidizing the underlayer (SiNx), if a TM atom has no free valence electrons (VE). Inversely a TM atom with free VE is stable in EUV.

KW - Extreme ultraviolet (EUV)

KW - Transition metal oxides

KW - Auger decay

KW - EUV lithography

M3 - Poster

T2 - 16th BESSY@HZB User Meeting 2024

Y2 - 11 December 2024 through 12 December 2024

ER -

Investigating EUV degradation with in-situ EUV transmission measurements

Abstract

Conference

Keywords

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Cite this