Investigating EUV degradation with in-situ EUV transmission measurements

Research output: Contribution to conferencePosterAcademic

Original languageEnglish
Publication statusPublished - 25 Sept 2024
EventASML PhD and Postdoc networking event 2024 - ASML, Veldhoven, Netherlands
Duration: 25 Sept 202425 Sept 2024

Conference

ConferenceASML PhD and Postdoc networking event 2024
Country/TerritoryNetherlands
CityVeldhoven
Period25/09/2425/09/24

Keywords

  • transition metal oxides
  • EUV
  • extreme ultraviolet (EUV)
  • Auger decay

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