Investigating EUV degradation with in-situ EUV transmission measurements

Research output: Contribution to conference › Poster › Academic

Original language	English
Publication status	Published - 25 Sept 2024
Event	ASML PhD and Postdoc networking event 2024 - ASML, Veldhoven, Netherlands Duration: 25 Sept 2024 → 25 Sept 2024

Conference	ASML PhD and Postdoc networking event 2024
Country/Territory	Netherlands
City	Veldhoven
Period	25/09/24 → 25/09/24

Keywords

@conference{224f66c5dba048e59b828c18a40a2e53,

title = "Investigating EUV degradation with in-situ EUV transmission measurements",

keywords = "transition metal oxides, EUV, extreme ultraviolet (EUV), Auger decay",

author = "Ramsamoedj, \{Duncan Ceylan\} and \{van den Beld\}, Wesley and Marcelo Ackermann",

year = "2024",

month = sep,

day = "25",

language = "English",

note = "ASML PhD and Postdoc networking event 2024 ; Conference date: 25-09-2024 Through 25-09-2024",

}

TY - CONF

T1 - Investigating EUV degradation with in-situ EUV transmission measurements

AU - Ramsamoedj, Duncan Ceylan

AU - van den Beld, Wesley

AU - Ackermann, Marcelo

PY - 2024/9/25

Y1 - 2024/9/25

KW - transition metal oxides

KW - EUV

KW - extreme ultraviolet (EUV)

KW - Auger decay

M3 - Poster

T2 - ASML PhD and Postdoc networking event 2024

Y2 - 25 September 2024 through 25 September 2024

ER -