Abstract
Material degradation in EUV is not yet fully understood due to the dependence on its electronic structure. We investigate the degradation of transition metal (TM) oxide (TMO) cap layers during EUV exposure. We hypothesize oxygen release from a TMO due to Auger decay, oxidizing the underlayer (SiNx), if a TM atom has no free valence electrons (VE). Inversely a TM atom with free VE is stable in EUV.
| Original language | English |
|---|---|
| Publication status | Published - 23 Sept 2024 |
| Event | MESA+ Meeting 2024 - Kinepolis, Enschede, Netherlands Duration: 23 Sept 2024 → 23 Sept 2024 https://www.utwente.nl/en/mesaplus/events/2024/9/1460310/mesa-meeting-2024 |
Conference
| Conference | MESA+ Meeting 2024 |
|---|---|
| Country/Territory | Netherlands |
| City | Enschede |
| Period | 23/09/24 → 23/09/24 |
| Internet address |
Keywords
- Extreme ultraviolet (EUV)
- Transition metal oxide
- Auger decay
- EUV Lithography
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