Investigation of impurity related phenomena, significant for novel semiconductor technologies

Franciscus Petrus Widdershoven

Research output: ThesisPhD Thesis - Research UT, graduation external

Abstract

The introduction of impurities into semiconductor materials during fabrication is addressed. Some phenomena related to the presence of such impurities are investigated. An investigation of the properties of erbium doped silicon is described, and the characterization, by several analysis techniques, of the interface between directly bonded n-type silicon wafers is reported. A theory describing the influence of correlation on electron mobility (between the positions of impurities within impurity clusters) is presented. The theory is applied to calculate the electron mobility of gallium arsenide in the presence of clusters of correlated impurities at a temperature of 77 K. This correlation is shown to have a significant influence on the mobility.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Pals, J.A., Supervisor
Award date8 Feb 1991
Place of PublicationEnschede
Publisher
Publication statusPublished - 8 Feb 1991

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