Investigations into the flow characteristics of hexagonal ducts etched in silicon

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    Original languageUndefined
    Title of host publicationProceedings of the SPIE, The International Siciety for Optical Engineering, Vol 4177
    Place of PublicationSanta Clara, USA
    Pages-
    Publication statusPublished - 15 Sep 2000

    Keywords

    • METIS-113206

    Cite this

    Damean, N., & Regtien, P. P. L. (2000). Investigations into the flow characteristics of hexagonal ducts etched in silicon. In Proceedings of the SPIE, The International Siciety for Optical Engineering, Vol 4177 (pp. -). Santa Clara, USA.