Ion implantation defect characterization by high-resolution X-ray diffraction

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings Symposium Materials Research Society, Vol. 262
Place of Publication	San Francisco
Pages	1121-1126
Number of pages	0
Publication status	Published - 26 Apr 1992

Keywords

@inproceedings{b52ffb81663e4155b55d8015996f1a85,

title = "Ion implantation defect characterization by high-resolution X-ray diffraction",

keywords = "METIS-114008",

author = "J.G.E. Klappe and I. Barsony and T.W. Ryan",

year = "1992",

month = apr,

day = "26",

language = "Undefined",

pages = "1121--1126",

booktitle = "Proceedings Symposium Materials Research Society, Vol. 262",

}