Iridium oxide as actuator material for the ISFET-based sensor- actuator system

Wouter Olthuis, Johan G. Bomer, Piet Bergveld, W.E. van der Linden, M. Bos

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Original languageUndefined
    Title of host publicationProceedings 3rd International Meeting on Chemical Sensors
    Place of PublicationCleveland, Ohio, USA
    Pages79-83
    Number of pages5
    Publication statusPublished - 24 Sept 1990

    Keywords

    • METIS-114173

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