Is there gas entrapped on submerged silicon wafers?

B.M. Borkent

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 16 Nov 2006
EventNanoNed MicroNed Symposium II 2006: NanoNed / MicroNed Symposium II - Eindhoven University of Technology, eindhoven, Netherlands
Duration: 16 Nov 200617 Nov 2006

Conference

ConferenceNanoNed MicroNed Symposium II 2006
CountryNetherlands
Cityeindhoven
Period16/11/0617/11/06
Other16-17 Nov 2006

Keywords

  • METIS-236689

Cite this

Borkent, B. M. (2006). Is there gas entrapped on submerged silicon wafers?. -. Poster session presented at NanoNed MicroNed Symposium II 2006, eindhoven, Netherlands.
Borkent, B.M. / Is there gas entrapped on submerged silicon wafers?. Poster session presented at NanoNed MicroNed Symposium II 2006, eindhoven, Netherlands.
@conference{85323d93fc864ac2bffca2d596a13849,
title = "Is there gas entrapped on submerged silicon wafers?",
keywords = "METIS-236689",
author = "B.M. Borkent",
year = "2006",
month = "11",
day = "16",
language = "Undefined",
pages = "--",
note = "null ; Conference date: 16-11-2006 Through 17-11-2006",

}

Borkent, BM 2006, 'Is there gas entrapped on submerged silicon wafers?' NanoNed MicroNed Symposium II 2006, eindhoven, Netherlands, 16/11/06 - 17/11/06, pp. -.

Is there gas entrapped on submerged silicon wafers? / Borkent, B.M.

2006. - Poster session presented at NanoNed MicroNed Symposium II 2006, eindhoven, Netherlands.

Research output: Contribution to conferencePosterOther research output

TY - CONF

T1 - Is there gas entrapped on submerged silicon wafers?

AU - Borkent, B.M.

PY - 2006/11/16

Y1 - 2006/11/16

KW - METIS-236689

M3 - Poster

SP - -

ER -

Borkent BM. Is there gas entrapped on submerged silicon wafers?. 2006. Poster session presented at NanoNed MicroNed Symposium II 2006, eindhoven, Netherlands.