Is there gas entrapped on submerged silicon wafers?

B.M. Borkent

Research output: Contribution to conferencePosterOther research output

Original languageUndefined
Pages-
Publication statusPublished - 17 Sep 2006
Event8th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2006 - Antwerp, Belgium
Duration: 18 Sep 200620 Sep 2006
Conference number: 8

Conference

Conference8th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2006
Abbreviated titleUCPSS 2006
CountryBelgium
CityAntwerp
Period18/09/0620/09/06

Keywords

  • METIS-236688

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