Is there gas entrapped on submerged silicon wafers?

B.M. Borkent

Is there gas entrapped on submerged silicon wafers?

B.M. Borkent

Physics of Fluids

Research output: Contribution to conference › Poster › Other research output

Original language	Undefined
Pages	-
Publication status	Published - 17 Sept 2006
Event	8th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2006 - Antwerp, Belgium Duration: 18 Sept 2006 → 20 Sept 2006 Conference number: 8

Conference

Conference	8th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2006
Abbreviated title	UCPSS 2006
Country/Territory	Belgium
City	Antwerp
Period	18/09/06 → 20/09/06

Keywords

METIS-236688

Cite this

@conference{2c52f2c59f8645f18ff6c03aa50d6175,

title = "Is there gas entrapped on submerged silicon wafers?",

keywords = "METIS-236688",

author = "B.M. Borkent",

year = "2006",

month = sep,

day = "17",

language = "Undefined",

pages = "--",

note = "8th International Symposium on Ultra Clean Processing of Semiconductor Surfaces, UCPSS 2006 ; Conference date: 18-09-2006 Through 20-09-2006",

}