Is there gas entrapped on submerged silicon wafers? Visualizing nano-scale bubbles with cavitation

B.M. Borkent

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Original languageUndefined
Title of host publicationProceedings of the UCPSS 2006, Antwerpen, Belgium
EditorsP. Mertens, M. Meuris, M. Heyns
Pages225-228
DOIs
Publication statusPublished - 17 Sep 2008

Publication series

Name
Volume134
ISSN (Print)1012-0394

Keywords

  • METIS-254503

Cite this

Borkent, B. M. (2008). Is there gas entrapped on submerged silicon wafers? Visualizing nano-scale bubbles with cavitation. In P. Mertens, M. Meuris, & M. Heyns (Eds.), Proceedings of the UCPSS 2006, Antwerpen, Belgium (pp. 225-228) https://doi.org/10.4028/www.scientific.net/SSP.134.225
Borkent, B.M. / Is there gas entrapped on submerged silicon wafers? Visualizing nano-scale bubbles with cavitation. Proceedings of the UCPSS 2006, Antwerpen, Belgium. editor / P. Mertens ; M. Meuris ; M. Heyns. 2008. pp. 225-228
@inproceedings{29371d26afec4f3c8316db52cae376f7,
title = "Is there gas entrapped on submerged silicon wafers? Visualizing nano-scale bubbles with cavitation",
keywords = "METIS-254503",
author = "B.M. Borkent",
note = "Ultra Clean Processing of Semiconductor Surfaces VIII",
year = "2008",
month = "9",
day = "17",
doi = "10.4028/www.scientific.net/SSP.134.225",
language = "Undefined",
pages = "225--228",
editor = "P. Mertens and M. Meuris and M. Heyns",
booktitle = "Proceedings of the UCPSS 2006, Antwerpen, Belgium",

}

Borkent, BM 2008, Is there gas entrapped on submerged silicon wafers? Visualizing nano-scale bubbles with cavitation. in P Mertens, M Meuris & M Heyns (eds), Proceedings of the UCPSS 2006, Antwerpen, Belgium. pp. 225-228. https://doi.org/10.4028/www.scientific.net/SSP.134.225

Is there gas entrapped on submerged silicon wafers? Visualizing nano-scale bubbles with cavitation. / Borkent, B.M.

Proceedings of the UCPSS 2006, Antwerpen, Belgium. ed. / P. Mertens; M. Meuris; M. Heyns. 2008. p. 225-228.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Is there gas entrapped on submerged silicon wafers? Visualizing nano-scale bubbles with cavitation

AU - Borkent, B.M.

N1 - Ultra Clean Processing of Semiconductor Surfaces VIII

PY - 2008/9/17

Y1 - 2008/9/17

KW - METIS-254503

U2 - 10.4028/www.scientific.net/SSP.134.225

DO - 10.4028/www.scientific.net/SSP.134.225

M3 - Conference contribution

SP - 225

EP - 228

BT - Proceedings of the UCPSS 2006, Antwerpen, Belgium

A2 - Mertens, P.

A2 - Meuris, M.

A2 - Heyns, M.

ER -

Borkent BM. Is there gas entrapped on submerged silicon wafers? Visualizing nano-scale bubbles with cavitation. In Mertens P, Meuris M, Heyns M, editors, Proceedings of the UCPSS 2006, Antwerpen, Belgium. 2008. p. 225-228 https://doi.org/10.4028/www.scientific.net/SSP.134.225