Is there gas entrapped on submerged silicon wafers?

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

Original language	Undefined
Title of host publication	Proceedings of the UCPSS 2006, Antwerpen, Belgium
Pages	-
Publication status	Published - 17 Sept 2006
Event	UCPSS 2006, Antwerpen, Belgium: Proceedings of the UCPSS 2006, Antwerpen, Belgium - Duration: 17 Sept 2006 → 20 Sept 2006

Conference	UCPSS 2006, Antwerpen, Belgium
Period	17/09/06 → 20/09/06

Keywords

@inproceedings{fb41df2b27104a13881acb7558db8527,

title = "Is there gas entrapped on submerged silicon wafers?",

keywords = "METIS-236691",

author = "B.M. Borkent",

year = "2006",

month = sep,

day = "17",

language = "Undefined",

pages = "--",

booktitle = "Proceedings of the UCPSS 2006, Antwerpen, Belgium",

note = "UCPSS 2006, Antwerpen, Belgium ; Conference date: 17-09-2006 Through 20-09-2006",

}