Original language | Undefined |
---|---|
Pages (from-to) | 247-249 |
Journal | Analytical methods and instrumentation |
Publication status | Published - 1996 |
Keywords
- METIS-111491
- IR-14209
R.W. Tjerkstra, Johannes G.E. Gardeniers, Albert van den Berg, Michael Curt Elwenspoek
Research output: Contribution to journal › Article › Academic
Original language | Undefined |
---|---|
Pages (from-to) | 247-249 |
Journal | Analytical methods and instrumentation |
Publication status | Published - 1996 |