Isotropically etched channels for gas chromatography

R.W. Tjerkstra, Johannes G.E. Gardeniers, Albert van den Berg, Michael Curt Elwenspoek

Research output: Contribution to journalArticleAcademic

Original languageUndefined
Pages (from-to)247-249
JournalAnalytical methods and instrumentation
Publication statusPublished - 1996

Keywords

  • METIS-111491
  • IR-14209

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