Issues of laser plasma sources for soft x-ray projection lithography

L. Shmaenok*, F. Bijkerk, E. Louis, A. van Honk, M. J. van der Wiel, Yu Platonov, A. Shevelko, A. Mitrofanov, H. Frowein, B. Nicolaus, F. Voß, R. Désor

*Corresponding author for this work

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