TY - JOUR
T1 - Josephson junctions and dc SQUIDs based on Nb/Al technology
AU - Flokstra, J.
AU - Adelerhof, D.J.
AU - Houwman, E.P.
AU - Veldhuis, D.
AU - Rogalla, H.
PY - 1991
Y1 - 1991
N2 - A process for fabricating high-quality Josephson junctions and DC SQUIDS on basis of Nb/Al technology has been developed. DC magnetron sputtering is used for the deposition of the metal layers and the barrier is formed by thermal oxidation of the Al-layer. The junction area of 5 µm × 5 5 µm is obtained using anodisation. Three types of Josephson tunnel junctions have been prepared: standard Nb/Al, AlOx/Nb, symmetric Nb/Al, AlOx, Al/Nb and Nb/Al, AlOx/AlOx/Nb, the latter having a double oxide layer. We performed current-voltage and conductance-voltage measurements at different temperatures and special attention was paid to the noise behaviour. Gap and sub-gap parameters as well as barrier parameters are presented. Three different DC SQUID configurations were developed on basis of the Nb/Al Josephson junctions. The measured characteristics of the standard Tesche-Clarke DC SQUID, the resistively shunted SQUID and the inductively shunted SQUID are compared with special attention being paid to the noise properties. A 19-channel DC SQUID magnetometer with standard and/or resistively-shunted DC SQUIDs is under construction.
AB - A process for fabricating high-quality Josephson junctions and DC SQUIDS on basis of Nb/Al technology has been developed. DC magnetron sputtering is used for the deposition of the metal layers and the barrier is formed by thermal oxidation of the Al-layer. The junction area of 5 µm × 5 5 µm is obtained using anodisation. Three types of Josephson tunnel junctions have been prepared: standard Nb/Al, AlOx/Nb, symmetric Nb/Al, AlOx, Al/Nb and Nb/Al, AlOx/AlOx/Nb, the latter having a double oxide layer. We performed current-voltage and conductance-voltage measurements at different temperatures and special attention was paid to the noise behaviour. Gap and sub-gap parameters as well as barrier parameters are presented. Three different DC SQUID configurations were developed on basis of the Nb/Al Josephson junctions. The measured characteristics of the standard Tesche-Clarke DC SQUID, the resistively shunted SQUID and the inductively shunted SQUID are compared with special attention being paid to the noise properties. A 19-channel DC SQUID magnetometer with standard and/or resistively-shunted DC SQUIDs is under construction.
U2 - 10.1088/0143-0815/12/B/008
DO - 10.1088/0143-0815/12/B/008
M3 - Article
SN - 0143-0815
VL - 12
SP - 59
EP - 67
JO - Clinical physics and physiological measurement
JF - Clinical physics and physiological measurement
IS - Suppl. B
ER -