Abstract
A process for fabricating high-quality Josephson junctions and DC SQUIDS on basis of Nb/Al technology has been developed. DC magnetron sputtering is used for the deposition of the metal layers and the barrier is formed by thermal oxidation of the Al-layer. The junction area of 5 µm × 5 5 µm is obtained using anodisation. Three types of Josephson tunnel junctions have been prepared: standard Nb/Al, AlOx/Nb, symmetric Nb/Al, AlOx, Al/Nb and Nb/Al, AlOx/AlOx/Nb, the latter having a double oxide layer. We performed current-voltage and conductance-voltage measurements at different temperatures and special attention was paid to the noise behaviour. Gap and sub-gap parameters as well as barrier parameters are presented. Three different DC SQUID configurations were developed on basis of the Nb/Al Josephson junctions. The measured characteristics of the standard Tesche-Clarke DC SQUID, the resistively shunted SQUID and the inductively shunted SQUID are compared with special attention being paid to the noise properties. A 19-channel DC SQUID magnetometer with standard and/or resistively-shunted DC SQUIDs is under construction.
| Original language | English |
|---|---|
| Pages (from-to) | 59-67 |
| Number of pages | 1 |
| Journal | Clinical physics and physiological measurement |
| Volume | 12 |
| Issue number | Suppl. B |
| DOIs | |
| Publication status | Published - 1991 |
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