Kelvin probe study of laterally inhomogeneous dielectric charging and charge diffusion in RF MEMS capacitive switches

R.W. Herfst, P.G. Steeneken, J. Schmitz, A.J.G. Mank, M. van Gils

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    48 Citations (Scopus)
    25 Downloads (Pure)

    Fingerprint

    Dive into the research topics of 'Kelvin probe study of laterally inhomogeneous dielectric charging and charge diffusion in RF MEMS capacitive switches'. Together they form a unique fingerprint.

    Physics & Astronomy