Kinetic physical etching for versatile novel design of well ordered self-affine nanogrooves

S. van Dijken, Dennis de Bruin, Bene Poelsema

Research output: Contribution to journalArticleAcademicpeer-review

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Abstract

Ion bombardment at extreme grazing incidence leads to the formation of remarkably well ordered, one to two atomic layer deep, parallel grooves on a Cu(001) surface. These self-organized grooves are oriented parallel to the ion's plane of incidence and their period can be controlled between ∼4 and 15 nm. We have identified two distinct temperature regimes: Between about 200 and 300 K the substrate temperature controls the period, while below 200 to about 150 K the ion energy does. The groove separation distribution shows distinct self-affine character. The physical origin of the novel nanostructures is discussed.
Original languageUndefined
Pages (from-to)4608-4611
Number of pages4
JournalPhysical review letters
Volume86
Issue number20
DOIs
Publication statusPublished - 2001

Keywords

  • METIS-202570
  • IR-61267

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