Kinetic study of EUV-induced plasma chemistry

Dmitry Astakhov, W.J. Goedheer, D. Lopaev

    Research output: Other contributionOther research output

    Original languageEnglish
    Place of PublicationRijnhuizen
    Publication statusPublished - 2011

    Keywords

    • METIS-304935

    Cite this

    Astakhov, D., Goedheer, W. J., & Lopaev, D. (2011). Kinetic study of EUV-induced plasma chemistry. Rijnhuizen.