Kinetic study of EUV-induced plasma chemistry

Dmitry Astakhov, W.J. Goedheer, D. Lopaev

    Research output: Other contribution › Other research output

    Original languageEnglish
    Place of PublicationRijnhuizen
    Publication statusPublished - 2011

    Keywords

    • METIS-304935

    Cite this

    Astakhov, D., Goedheer, W. J., & Lopaev, D. (2011). Kinetic study of EUV-induced plasma chemistry. Rijnhuizen.
    Astakhov, Dmitry ; Goedheer, W.J. ; Lopaev, D. / Kinetic study of EUV-induced plasma chemistry. 2011. Rijnhuizen.
    @misc{3fc46919eff74837a30c7db17fbd8882,
    title = "Kinetic study of EUV-induced plasma chemistry",
    keywords = "METIS-304935",
    author = "Dmitry Astakhov and W.J. Goedheer and D. Lopaev",
    year = "2011",
    language = "English",
    type = "Other",

    }

    Astakhov, D, Goedheer, WJ & Lopaev, D 2011, Kinetic study of EUV-induced plasma chemistry. Rijnhuizen.

    Kinetic study of EUV-induced plasma chemistry. / Astakhov, Dmitry; Goedheer, W.J.; Lopaev, D.

    Rijnhuizen. 2011, .

    Research output: Other contribution › Other research output

    TY - GEN

    T1 - Kinetic study of EUV-induced plasma chemistry

    AU - Astakhov, Dmitry

    AU - Goedheer, W.J.

    AU - Lopaev, D.

    PY - 2011

    Y1 - 2011

    KW - METIS-304935

    M3 - Other contribution

    CY - Rijnhuizen

    ER -

    Astakhov D, Goedheer WJ, Lopaev D. Kinetic study of EUV-induced plasma chemistry. 2011.