Kinetics of Polycrystalline Tungsten and Silicon CVD

J. Holleman

    Research output: ThesisPhD Thesis - Research UT, graduation UT

    Original languageUndefined
    Awarding Institution
    • University of Twente
    Supervisors/Advisors
    • Popma, T.J.A., Supervisor
    • Verweij, J.F., Supervisor
    Award date26 Feb 1993
    Place of PublicationEnschede
    Publisher
    Print ISBNs90-9005797-8
    Publication statusPublished - 26 Feb 1993

    Keywords

    • METIS-111433

    Cite this

    Holleman, J. (1993). Kinetics of Polycrystalline Tungsten and Silicon CVD. Enschede: Universiteit Twente.