Kinetics of Polycrystalline Tungsten and Silicon CVD

Jisk Holleman

Research output: Thesis › PhD Thesis - Research UT, graduation UT

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	University of Twente
Supervisors/Advisors	Popma, Th.J.A., Supervisor Verweij, J.F., Supervisor
Award date	26 Feb 1993
Place of Publication	Enschede
Publisher	University of Twente
Print ISBNs	90-90-05797-8
Publication status	Published - 26 Feb 1993

Cite this

@phdthesis{7aa806b073c34e108250ef5536eba381,

title = "Kinetics of Polycrystalline Tungsten and Silicon CVD",

author = "Jisk Holleman",

year = "1993",

month = feb,

day = "26",

language = "English",

isbn = "90-90-05797-8",

publisher = "University of Twente",

address = "Netherlands",

type = "PhD Thesis - Research UT, graduation UT",

school = "University of Twente",

}