Kontrollierter Mikroabtrag an Schichtsystemen mittels Laserstrahlung und online Plasma Spektrokopie (LIPS)

M. Lentjes, K. Dickmann, J. Meijer

Research output: Contribution to journal › Article › Academic

Original language	Undefined
Pages (from-to)	87-91
Number of pages	5
Journal	Journal of the University of applied sciences Mittweida
Volume	5
Issue number	2006
Publication status	Published - 2006

Keywords

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title = "Kontrollierter Mikroabtrag an Schichtsystemen mittels Laserstrahlung und online Plasma Spektrokopie (LIPS)",

keywords = "METIS-235534",

author = "M. Lentjes and K. Dickmann and J. Meijer",

year = "2006",

language = "Undefined",

volume = "5",

pages = "87--91",

journal = "Journal of the University of applied sciences Mittweida",

issn = "1430-3698",

publisher = "The University of Applied Science Mittweida",

number = "2006",

}

TY - JOUR

T1 - Kontrollierter Mikroabtrag an Schichtsystemen mittels Laserstrahlung und online Plasma Spektrokopie (LIPS)

AU - Lentjes, M.

AU - Dickmann, K.

AU - Meijer, J.

PY - 2006

Y1 - 2006

KW - METIS-235534

M3 - Article

SN - 1430-3698

VL - 5

SP - 87

EP - 91

JO - Journal of the University of applied sciences Mittweida

JF - Journal of the University of applied sciences Mittweida

IS - 2006

ER -