Large-area fabrication of sub-μm PDMS through hole membranes

Hai Le The, Marciano Palma Do Carmo, Marinke van der Helm, Johan G. Bomer, Loes Segerink, Albert van den Berg, Jan C.T. Eijkel

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

Abstract

We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.
Original languageEnglish
Title of host publication21st International Conference on Miniaturized Systems for Chemistry and Life Sciences
EditorsAbraham Lee, Don DeVoe
PublisherThe Chemical and Biological Microsystems Society
Pages375
Number of pages2
ISBN (Print)978-0-692-94183-6
Publication statusPublished - 22 Oct 2017
Event21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017 - Savannah International Trade & Convention Center, Savannah, United States
Duration: 22 Oct 201726 Oct 2017
Conference number: 21
https://www.microtas2017.org/

Publication series

Name
ISSN (Print)1556-5904

Conference

Conference21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017
Abbreviated titleMicroTAS
CountryUnited States
CitySavannah
Period22/10/1726/10/17
Internet address

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membranes
fabrication

Cite this

Le The, H., Palma Do Carmo, M., van der Helm, M., Bomer, J. G., Segerink, L., van den Berg, A., & Eijkel, J. C. T. (2017). Large-area fabrication of sub-μm PDMS through hole membranes. In A. Lee, & D. DeVoe (Eds.), 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 375). The Chemical and Biological Microsystems Society.
Le The, Hai ; Palma Do Carmo, Marciano ; van der Helm, Marinke ; Bomer, Johan G. ; Segerink, Loes ; van den Berg, Albert ; Eijkel, Jan C.T. / Large-area fabrication of sub-μm PDMS through hole membranes. 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. editor / Abraham Lee ; Don DeVoe. The Chemical and Biological Microsystems Society, 2017. pp. 375
@inproceedings{e757582333ea42fbab59e8b1d1d76093,
title = "Large-area fabrication of sub-μm PDMS through hole membranes",
abstract = "We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.",
author = "{Le The}, Hai and {Palma Do Carmo}, Marciano and {van der Helm}, Marinke and Bomer, {Johan G.} and Loes Segerink and {van den Berg}, Albert and Eijkel, {Jan C.T.}",
year = "2017",
month = "10",
day = "22",
language = "English",
isbn = "978-0-692-94183-6",
publisher = "The Chemical and Biological Microsystems Society",
pages = "375",
editor = "Lee, {Abraham } and Don DeVoe",
booktitle = "21st International Conference on Miniaturized Systems for Chemistry and Life Sciences",

}

Le The, H, Palma Do Carmo, M, van der Helm, M, Bomer, JG, Segerink, L, van den Berg, A & Eijkel, JCT 2017, Large-area fabrication of sub-μm PDMS through hole membranes. in A Lee & D DeVoe (eds), 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. The Chemical and Biological Microsystems Society, pp. 375, 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017, Savannah, United States, 22/10/17.

Large-area fabrication of sub-μm PDMS through hole membranes. / Le The, Hai ; Palma Do Carmo, Marciano; van der Helm, Marinke; Bomer, Johan G.; Segerink, Loes; van den Berg, Albert ; Eijkel, Jan C.T.

21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. ed. / Abraham Lee; Don DeVoe. The Chemical and Biological Microsystems Society, 2017. p. 375.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Large-area fabrication of sub-μm PDMS through hole membranes

AU - Le The, Hai

AU - Palma Do Carmo, Marciano

AU - van der Helm, Marinke

AU - Bomer, Johan G.

AU - Segerink, Loes

AU - van den Berg, Albert

AU - Eijkel, Jan C.T.

PY - 2017/10/22

Y1 - 2017/10/22

N2 - We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.

AB - We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.

M3 - Conference contribution

SN - 978-0-692-94183-6

SP - 375

BT - 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences

A2 - Lee, Abraham

A2 - DeVoe, Don

PB - The Chemical and Biological Microsystems Society

ER -

Le The H, Palma Do Carmo M, van der Helm M, Bomer JG, Segerink L, van den Berg A et al. Large-area fabrication of sub-μm PDMS through hole membranes. In Lee A, DeVoe D, editors, 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. The Chemical and Biological Microsystems Society. 2017. p. 375