Large-area fabrication of sub-μm PDMS through hole membranes

Hai Le-The, M.A. Palma do Carmo, M.W. van der Helm, J.G. Bomer, L.I. Segerink, A. van den Berg, J.C.T. Eijkel

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Abstract

We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.
Original languageEnglish
Title of host publication21st International Conference on Miniaturized Systems for Chemistry and Life Sciences
EditorsAbraham Lee, Don DeVoe
PublisherThe Chemical and Biological Microsystems Society
Pages375-376
Number of pages2
ISBN (Print)978-0-692-94183-6
Publication statusPublished - 22 Oct 2017
Event21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017 - Savannah International Trade & Convention Center, Savannah, United States
Duration: 22 Oct 201726 Oct 2017
Conference number: 21
https://www.microtas2017.org/

Publication series

NameInternational Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS)
Volume2017
ISSN (Print)1556-5904

Conference

Conference21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017
Abbreviated titleMicroTAS
CountryUnited States
CitySavannah
Period22/10/1726/10/17
Internet address

Keywords

  • Through-hole PDMS membrane
  • Free-standing PDMS nanomembrane

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  • Cite this

    Le-The, H., Palma do Carmo, M. A., van der Helm, M. W., Bomer, J. G., Segerink, L. I., van den Berg, A., & Eijkel, J. C. T. (2017). Large-area fabrication of sub-μm PDMS through hole membranes. In A. Lee, & D. DeVoe (Eds.), 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 375-376). (International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS); Vol. 2017). The Chemical and Biological Microsystems Society.