Large-area fabrication of sub-μm PDMS through hole membranes

Hai Le The, Marciano Palma Do Carmo, Marinke van der Helm, Johan G. Bomer, Loes Segerink, Albert van den Berg, Jan C.T. Eijkel

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    Abstract

    We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.
    Original languageEnglish
    Title of host publication21st International Conference on Miniaturized Systems for Chemistry and Life Sciences
    EditorsAbraham Lee, Don DeVoe
    PublisherThe Chemical and Biological Microsystems Society
    Pages375
    Number of pages2
    ISBN (Print)978-0-692-94183-6
    Publication statusPublished - 22 Oct 2017
    Event21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017 - Savannah International Trade & Convention Center, Savannah, United States
    Duration: 22 Oct 201726 Oct 2017
    Conference number: 21
    https://www.microtas2017.org/

    Publication series

    Name
    ISSN (Print)1556-5904

    Conference

    Conference21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017
    Abbreviated titleMicroTAS
    CountryUnited States
    CitySavannah
    Period22/10/1726/10/17
    Internet address

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    Cite this

    Le The, H., Palma Do Carmo, M., van der Helm, M., Bomer, J. G., Segerink, L., van den Berg, A., & Eijkel, J. C. T. (2017). Large-area fabrication of sub-μm PDMS through hole membranes. In A. Lee, & D. DeVoe (Eds.), 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 375). The Chemical and Biological Microsystems Society.
    Le The, Hai ; Palma Do Carmo, Marciano ; van der Helm, Marinke ; Bomer, Johan G. ; Segerink, Loes ; van den Berg, Albert ; Eijkel, Jan C.T. / Large-area fabrication of sub-μm PDMS through hole membranes. 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. editor / Abraham Lee ; Don DeVoe. The Chemical and Biological Microsystems Society, 2017. pp. 375
    @inproceedings{e757582333ea42fbab59e8b1d1d76093,
    title = "Large-area fabrication of sub-μm PDMS through hole membranes",
    abstract = "We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.",
    author = "{Le The}, Hai and {Palma Do Carmo}, Marciano and {van der Helm}, Marinke and Bomer, {Johan G.} and Loes Segerink and {van den Berg}, Albert and Eijkel, {Jan C.T.}",
    year = "2017",
    month = "10",
    day = "22",
    language = "English",
    isbn = "978-0-692-94183-6",
    publisher = "The Chemical and Biological Microsystems Society",
    pages = "375",
    editor = "Lee, {Abraham } and Don DeVoe",
    booktitle = "21st International Conference on Miniaturized Systems for Chemistry and Life Sciences",

    }

    Le The, H, Palma Do Carmo, M, van der Helm, M, Bomer, JG, Segerink, L, van den Berg, A & Eijkel, JCT 2017, Large-area fabrication of sub-μm PDMS through hole membranes. in A Lee & D DeVoe (eds), 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. The Chemical and Biological Microsystems Society, pp. 375, 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017, Savannah, United States, 22/10/17.

    Large-area fabrication of sub-μm PDMS through hole membranes. / Le The, Hai ; Palma Do Carmo, Marciano; van der Helm, Marinke; Bomer, Johan G.; Segerink, Loes; van den Berg, Albert ; Eijkel, Jan C.T.

    21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. ed. / Abraham Lee; Don DeVoe. The Chemical and Biological Microsystems Society, 2017. p. 375.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Large-area fabrication of sub-μm PDMS through hole membranes

    AU - Le The, Hai

    AU - Palma Do Carmo, Marciano

    AU - van der Helm, Marinke

    AU - Bomer, Johan G.

    AU - Segerink, Loes

    AU - van den Berg, Albert

    AU - Eijkel, Jan C.T.

    PY - 2017/10/22

    Y1 - 2017/10/22

    N2 - We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.

    AB - We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.

    M3 - Conference contribution

    SN - 978-0-692-94183-6

    SP - 375

    BT - 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences

    A2 - Lee, Abraham

    A2 - DeVoe, Don

    PB - The Chemical and Biological Microsystems Society

    ER -

    Le The H, Palma Do Carmo M, van der Helm M, Bomer JG, Segerink L, van den Berg A et al. Large-area fabrication of sub-μm PDMS through hole membranes. In Lee A, DeVoe D, editors, 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. The Chemical and Biological Microsystems Society. 2017. p. 375