Large-area fabrication of sub-μm PDMS through hole membranes

Hai  Le-The; M.A. Palma do Carmo; M.W. van der Helm; J.G. Bomer; L.I. Segerink; A. van den Berg; J.C.T. Eijkel

Large-area fabrication of sub-μm PDMS through hole membranes

Hai Le-The
, M.A. Palma do Carmo
, M.W. van der Helm
, J.G. Bomer
, L.I. Segerink
, A. van den Berg
, J.C.T. Eijkel

Biomedical and Environmental Sensorsystems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

211 Downloads (Pure)

Abstract

We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.

Original language	English
Title of host publication	21st International Conference on Miniaturized Systems for Chemistry and Life Sciences
Editors	Abraham Lee, Don DeVoe
Publisher	The Chemical and Biological Microsystems Society
Pages	375-376
Number of pages	2
ISBN (Print)	978-0-692-94183-6
Publication status	Published - 22 Oct 2017
Event	21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017 - Savannah International Trade & Convention Center, Savannah, United States Duration: 22 Oct 2017 → 26 Oct 2017 Conference number: 21 https://www.microtas2017.org/

Publication series

Name	International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS)
Volume	2017
ISSN (Print)	1556-5904

Conference

Conference	21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017
Abbreviated title	MicroTAS
Country/Territory	United States
City	Savannah
Period	22/10/17 → 26/10/17
Internet address	https://www.microtas2017.org/

Keywords

Through-hole PDMS membrane
Free-standing PDMS nanomembrane

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Le-The, H., Palma do Carmo, M. A., van der Helm, M. W., Bomer, J. G., Segerink, L. I., van den Berg, A., & Eijkel, J. C. T. (2017). Large-area fabrication of sub-μm PDMS through hole membranes. In A. Lee, & D. DeVoe (Eds.), 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences (pp. 375-376). (International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS); Vol. 2017). The Chemical and Biological Microsystems Society.

Le-The, Hai ; Palma do Carmo, M.A. ; van der Helm, M.W. et al. / Large-area fabrication of sub-μm PDMS through hole membranes. 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. editor / Abraham Lee ; Don DeVoe. The Chemical and Biological Microsystems Society, 2017. pp. 375-376 (International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS)).

@inproceedings{e757582333ea42fbab59e8b1d1d76093,

title = "Large-area fabrication of sub-μm PDMS through hole membranes",

abstract = "We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.",

keywords = "Through-hole PDMS membrane, Free-standing PDMS nanomembrane",

author = "Hai Le-The and \{Palma do Carmo\}, M.A. and \{van der Helm\}, M.W. and J.G. Bomer and L.I. Segerink and \{van den Berg\}, A. and J.C.T. Eijkel",

year = "2017",

month = oct,

day = "22",

language = "English",

isbn = "978-0-692-94183-6",

series = "International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS)",

publisher = "The Chemical and Biological Microsystems Society",

pages = "375--376",

editor = "Lee, \{Abraham \} and Don DeVoe",

booktitle = "21st International Conference on Miniaturized Systems for Chemistry and Life Sciences",

note = "21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017, MicroTAS ; Conference date: 22-10-2017 Through 26-10-2017",

url = "https://www.microtas2017.org/",

}

Le-The, H, Palma do Carmo, MA, van der Helm, MW, Bomer, JG , Segerink, LI , van den Berg, A & Eijkel, JCT 2017, Large-area fabrication of sub-μm PDMS through hole membranes. in A Lee & D DeVoe (eds), 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS), vol. 2017, The Chemical and Biological Microsystems Society, pp. 375-376, 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017, Savannah, Georgia, United States, 22/10/17.

Large-area fabrication of sub-μm PDMS through hole membranes. / Le-The, Hai ; Palma do Carmo, M.A.; van der Helm, M.W. et al.
21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. ed. / Abraham Lee; Don DeVoe. The Chemical and Biological Microsystems Society, 2017. p. 375-376 (International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS); Vol. 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Large-area fabrication of sub-μm PDMS through hole membranes

AU - Le-The, Hai

AU - Palma do Carmo, M.A.

AU - van der Helm, M.W.

AU - Bomer, J.G.

AU - Segerink, L.I.

AU - van den Berg, A.

AU - Eijkel, J.C.T.

N1 - Conference code: 21

PY - 2017/10/22

Y1 - 2017/10/22

N2 - We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.

AB - We report and demonstrate a robust and high-yield fabrication method that allows to pattern ultrathin (sub-μm) and free-standing polydimethylsiloxane (PDMS) membranes with through-holes over large-areas.

KW - Through-hole PDMS membrane

KW - Free-standing PDMS nanomembrane

M3 - Conference contribution

SN - 978-0-692-94183-6

T3 - International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS)

SP - 375

EP - 376

BT - 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences

A2 - Lee, Abraham

A2 - DeVoe, Don

PB - The Chemical and Biological Microsystems Society

T2 - 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences, μTAS 2017

Y2 - 22 October 2017 through 26 October 2017

ER -

Le-The H, Palma do Carmo MA, van der Helm MW, Bomer JG , Segerink LI , van den Berg A et al. Large-area fabrication of sub-μm PDMS through hole membranes. In Lee A, DeVoe D, editors, 21st International Conference on Miniaturized Systems for Chemistry and Life Sciences. The Chemical and Biological Microsystems Society. 2017. p. 375-376. (International Conference on Miniaturized Systems for Chemistry and Life Sciences (μTAS)).

Large-area fabrication of sub-μm PDMS through hole membranes

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Keywords

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