Large-area fabrication of sub-30 NM periodic nanostructures

Hai Le The; Johan W. Berenschot; Roald M. Tiggelaar; Niels Roelof Tas; Albert van den Berg; Jan C.T. Eijkel

Large-area fabrication of sub-30 NM periodic nanostructures

Hai Le The, Johan W. Berenschot, Roald M. Tiggelaar, Niels Roelof Tas, Albert van den Berg, Jan C.T. Eijkel

Mesoscale Chemical Systems

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We demonstrate a robust and high-yield fabrication method without deep-UV laser source by combining displacement Talbot lithography (DTL) using a monochromatic UV beam with dryetching techniques to pattern sub-30 nm periodic nanostructures over large-areas. Using this fabrication method, we fabricated 30-100 nm nanocolumns arrays of photoresist and sub-30 nm gold (Au) nanoparticle arrays.

Original language	Undefined
Title of host publication	20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016
Publisher	The Chemical and Biological Microsystems Society
Pages	1124-1125
Number of pages	2
ISBN (Print)	978-0-9798064-9-0
Publication status	Published - 9 Oct 2016
Event	20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, µTAS 2016 - Convention Center Dublin, Dublin, Ireland Duration: 9 Oct 2016 → 13 Oct 2016 Conference number: 20 http://www.microtas2016.org/

Publication series

Name	International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS)
Publisher	The Chemical and Biological Microsystems Society
Number	--
ISSN (Print)	1556-5904

Conference

Conference	20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, µTAS 2016
Abbreviated title	MicroTAS 2016
Country/Territory	Ireland
City	Dublin
Period	9/10/16 → 13/10/16
Internet address	http://www.microtas2016.org/

Keywords

EWI-27513
IR-102623
METIS-319510

Access to Document

http://www.microtas2016.org/

Cite this

Le The, H., Berenschot, J. W., Tiggelaar, R. M., Tas, N. R., van den Berg, A., & Eijkel, J. C. T. (2016). Large-area fabrication of sub-30 NM periodic nanostructures. In 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016 (pp. 1124-1125). (International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS); No. --). The Chemical and Biological Microsystems Society. http://www.microtas2016.org/

Le The, Hai ; Berenschot, Johan W. ; Tiggelaar, Roald M. et al. / Large-area fabrication of sub-30 NM periodic nanostructures. 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016. The Chemical and Biological Microsystems Society, 2016. pp. 1124-1125 (International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS); --).

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title = "Large-area fabrication of sub-30 NM periodic nanostructures",

abstract = "We demonstrate a robust and high-yield fabrication method without deep-UV laser source by combining displacement Talbot lithography (DTL) using a monochromatic UV beam with dryetching techniques to pattern sub-30 nm periodic nanostructures over large-areas. Using this fabrication method, we fabricated 30-100 nm nanocolumns arrays of photoresist and sub-30 nm gold (Au) nanoparticle arrays.",

keywords = "EWI-27513, IR-102623, METIS-319510",

author = "{Le The}, Hai and Berenschot, {Johan W.} and Tiggelaar, {Roald M.} and Tas, {Niels Roelof} and {van den Berg}, Albert and Eijkel, {Jan C.T.}",

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month = oct,

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Le The, H, Berenschot, JW , Tiggelaar, RM , Tas, NR , van den Berg, A & Eijkel, JCT 2016, Large-area fabrication of sub-30 NM periodic nanostructures. in 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016. International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS), no. --, The Chemical and Biological Microsystems Society, pp. 1124-1125, 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, µTAS 2016, Dublin, Ireland, 9/10/16. <http://www.microtas2016.org/>

Large-area fabrication of sub-30 NM periodic nanostructures. / Le The, Hai; Berenschot, Johan W.; Tiggelaar, Roald M. et al.

20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016. The Chemical and Biological Microsystems Society, 2016. p. 1124-1125 (International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS); No. --).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Large-area fabrication of sub-30 NM periodic nanostructures

AU - Le The, Hai

AU - Berenschot, Johan W.

AU - Tiggelaar, Roald M.

AU - Tas, Niels Roelof

AU - van den Berg, Albert

AU - Eijkel, Jan C.T.

N1 - Conference code: 20

PY - 2016/10/9

Y1 - 2016/10/9

N2 - We demonstrate a robust and high-yield fabrication method without deep-UV laser source by combining displacement Talbot lithography (DTL) using a monochromatic UV beam with dryetching techniques to pattern sub-30 nm periodic nanostructures over large-areas. Using this fabrication method, we fabricated 30-100 nm nanocolumns arrays of photoresist and sub-30 nm gold (Au) nanoparticle arrays.

AB - We demonstrate a robust and high-yield fabrication method without deep-UV laser source by combining displacement Talbot lithography (DTL) using a monochromatic UV beam with dryetching techniques to pattern sub-30 nm periodic nanostructures over large-areas. Using this fabrication method, we fabricated 30-100 nm nanocolumns arrays of photoresist and sub-30 nm gold (Au) nanoparticle arrays.

KW - EWI-27513

KW - IR-102623

KW - METIS-319510

M3 - Conference contribution

SN - 978-0-9798064-9-0

T3 - International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS)

SP - 1124

EP - 1125

BT - 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016

PB - The Chemical and Biological Microsystems Society

Y2 - 9 October 2016 through 13 October 2016

ER -

Le The H, Berenschot JW , Tiggelaar RM , Tas NR , van den Berg A , Eijkel JCT. Large-area fabrication of sub-30 NM periodic nanostructures. In 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016. The Chemical and Biological Microsystems Society. 2016. p. 1124-1125. (International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS); --).