Large-area fabrication of sub-30 NM periodic nanostructures

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Abstract

We demonstrate a robust and high-yield fabrication method without deep-UV laser source by combining displacement Talbot lithography (DTL) using a monochromatic UV beam with dryetching techniques to pattern sub-30 nm periodic nanostructures over large-areas. Using this fabrication method, we fabricated 30-100 nm nanocolumns arrays of photoresist and sub-30 nm gold (Au) nanoparticle arrays.
Original languageUndefined
Title of host publication20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016
PublisherThe Chemical and Biological Microsystems Society
Pages1124-1125
Number of pages2
ISBN (Print)978-0-9798064-9-0
Publication statusPublished - 9 Oct 2016
Event20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, µTAS 2016 - Convention Center Dublin, Dublin, Ireland
Duration: 9 Oct 201613 Oct 2016
Conference number: 20
http://www.microtas2016.org/

Publication series

NameInternational Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS)
PublisherThe Chemical and Biological Microsystems Society
Number--
ISSN (Print)1556-5904

Conference

Conference20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, µTAS 2016
Abbreviated titleMicroTAS 2016
CountryIreland
CityDublin
Period9/10/1613/10/16
Internet address

Keywords

  • EWI-27513
  • IR-102623
  • METIS-319510

Cite this

Le The, H., Berenschot, J. W., Tiggelaar, R. M., Tas, N. R., van den Berg, A., & Eijkel, J. C. T. (2016). Large-area fabrication of sub-30 NM periodic nanostructures. In 20th International Conference on Miniaturized Systems for Chemistry and LifeSciences, MicroTAS 2016 (pp. 1124-1125). (International Conference on Miniaturized Systems for Chemistry and LifeSciences (MicroTAS); No. --). The Chemical and Biological Microsystems Society.