Large area metal nanowire arrays with submicron pitch and tunable sub-20 nm nanogaps

Loan Le Thi Ngoc, Mingliang Jin, Albert van den Berg, Edwin Carlen

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    Abstract

    We present a new top-down nanofabrication technology to realize large area metal nanowire (m-NW) arrays with tunable sub-20 nm separation nanogaps without the use of chemical etching or milling of the metal layer. The nanofabrication technology is based on a self-regulating metal deposition process that is facilitated by closely spaced and isolated heterogeneous template surfaces that confines the metal deposition into two dimensions. Electrically isolated parallel arrays of m-NW can be realized with uniform and controllable nanogaps. Au-NW arrays are presented with high-density ~105 NWs cm-1, variable NW diameters down to 50 nm, variable nanogaps down to 5 nm, and very large nanogap length density ~1 km cm-2. A spatially averaged surface enhanced Raman scattering (SERS) analytical enhancement factor of (1.5±0.2)×107 is demonstrated from a benzenethiol monolayer chemisorbed on a Au-NW array substrate
    Original languageUndefined
    Title of host publicationThe 17th International Conference on Solid-State Sensors, Actuators and Microsystems
    Place of PublicationBarcelona
    PublisherIEEE
    Pages206-209
    Number of pages4
    ISBN (Print)978-1-4673-5983-2
    DOIs
    Publication statusPublished - 16 Jun 2013
    Event17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain
    Duration: 16 Jun 201320 Jun 2013
    Conference number: 17
    http://www.transducers-eurosensors2013.org/

    Publication series

    NameTransducers 2013 & Eurosensors XXVII
    PublisherIEEE
    Volume2013

    Conference

    Conference17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
    Abbreviated titleTRANSDUCERS 2013
    CountrySpain
    CityBarcelona
    Period16/06/1320/06/13
    OtherHeld in conjunction with EUROSENSORS XXVII
    Internet address

    Keywords

    • EWI-24118
    • METIS-300226
    • IR-88284

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