Large area metal nanowire arrays with submicron pitch and tunable sub-20 nm nanogaps

Loan Le Thi Ngoc; Mingliang Jin; Albert van den Berg; Edwin Carlen

doi:10.1109/Transducers.2013.6626738

Large area metal nanowire arrays with submicron pitch and tunable sub-20 nm nanogaps

Loan Le Thi Ngoc, Mingliang Jin, Albert van den Berg, Edwin Carlen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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Abstract

We present a new top-down nanofabrication technology to realize large area metal nanowire (m-NW) arrays with tunable sub-20 nm separation nanogaps without the use of chemical etching or milling of the metal layer. The nanofabrication technology is based on a self-regulating metal deposition process that is facilitated by closely spaced and isolated heterogeneous template surfaces that confines the metal deposition into two dimensions. Electrically isolated parallel arrays of m-NW can be realized with uniform and controllable nanogaps. Au-NW arrays are presented with high-density ~105 NWs cm-1, variable NW diameters down to 50 nm, variable nanogaps down to 5 nm, and very large nanogap length density ~1 km cm-2. A spatially averaged surface enhanced Raman scattering (SERS) analytical enhancement factor of (1.5±0.2)×107 is demonstrated from a benzenethiol monolayer chemisorbed on a Au-NW array substrate

Original language	Undefined
Title of host publication	The 17th International Conference on Solid-State Sensors, Actuators and Microsystems
Place of Publication	Barcelona
Publisher	IEEE
Pages	206-209
Number of pages	4
ISBN (Print)	978-1-4673-5983-2
DOIs	https://doi.org/10.1109/Transducers.2013.6626738
Publication status	Published - 16 Jun 2013
Event	17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013 Conference number: 17 http://www.transducers-eurosensors2013.org/

Publication series

Name	Transducers 2013 & Eurosensors XXVII
Publisher	IEEE
Volume	2013

Conference

Conference	17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
Abbreviated title	TRANSDUCERS 2013
Country/Territory	Spain
City	Barcelona
Period	16/06/13 → 20/06/13
Other	Held in conjunction with EUROSENSORS XXVII
Internet address	http://www.transducers-eurosensors2013.org/

Keywords

EWI-24118
METIS-300226
IR-88284

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

Access to Document

10.1109/Transducers.2013.6626738

http://eprints.eemcs.utwente.nl/secure2/24118/01/PID2712835.pdf

Cite this

@inproceedings{22577c8e120a4e638fb3a223041b8ccb,

title = "Large area metal nanowire arrays with submicron pitch and tunable sub-20 nm nanogaps",

abstract = "We present a new top-down nanofabrication technology to realize large area metal nanowire (m-NW) arrays with tunable sub-20 nm separation nanogaps without the use of chemical etching or milling of the metal layer. The nanofabrication technology is based on a self-regulating metal deposition process that is facilitated by closely spaced and isolated heterogeneous template surfaces that confines the metal deposition into two dimensions. Electrically isolated parallel arrays of m-NW can be realized with uniform and controllable nanogaps. Au-NW arrays are presented with high-density ~105 NWs cm-1, variable NW diameters down to 50 nm, variable nanogaps down to 5 nm, and very large nanogap length density ~1 km cm-2. A spatially averaged surface enhanced Raman scattering (SERS) analytical enhancement factor of (1.5±0.2)×107 is demonstrated from a benzenethiol monolayer chemisorbed on a Au-NW array substrate",

keywords = "EWI-24118, METIS-300226, IR-88284",

author = "{Le Thi Ngoc}, Loan and Mingliang Jin and {van den Berg}, Albert and Edwin Carlen",

note = "10.1109/Transducers.2013.6626738 ; 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",

year = "2013",

month = jun,

day = "16",

doi = "10.1109/Transducers.2013.6626738",

language = "Undefined",

isbn = "978-1-4673-5983-2",

series = "Transducers 2013 & Eurosensors XXVII",

publisher = "IEEE",

pages = "206--209",

booktitle = "The 17th International Conference on Solid-State Sensors, Actuators and Microsystems",

address = "United States",

url = "http://www.transducers-eurosensors2013.org/",

}

Le Thi Ngoc, L, Jin, M, van den Berg, A & Carlen, E 2013, Large area metal nanowire arrays with submicron pitch and tunable sub-20 nm nanogaps. in The 17th International Conference on Solid-State Sensors, Actuators and Microsystems. Transducers 2013 & Eurosensors XXVII, vol. 2013, IEEE, Barcelona, pp. 206-209, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6626738

Large area metal nanowire arrays with submicron pitch and tunable sub-20 nm nanogaps. / Le Thi Ngoc, Loan; Jin, Mingliang; van den Berg, Albert et al.
The 17th International Conference on Solid-State Sensors, Actuators and Microsystems. Barcelona: IEEE, 2013. p. 206-209 (Transducers 2013 & Eurosensors XXVII; Vol. 2013).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Large area metal nanowire arrays with submicron pitch and tunable sub-20 nm nanogaps

AU - Le Thi Ngoc, Loan

AU - Jin, Mingliang

AU - van den Berg, Albert

AU - Carlen, Edwin

N1 - Conference code: 17

PY - 2013/6/16

Y1 - 2013/6/16

N2 - We present a new top-down nanofabrication technology to realize large area metal nanowire (m-NW) arrays with tunable sub-20 nm separation nanogaps without the use of chemical etching or milling of the metal layer. The nanofabrication technology is based on a self-regulating metal deposition process that is facilitated by closely spaced and isolated heterogeneous template surfaces that confines the metal deposition into two dimensions. Electrically isolated parallel arrays of m-NW can be realized with uniform and controllable nanogaps. Au-NW arrays are presented with high-density ~105 NWs cm-1, variable NW diameters down to 50 nm, variable nanogaps down to 5 nm, and very large nanogap length density ~1 km cm-2. A spatially averaged surface enhanced Raman scattering (SERS) analytical enhancement factor of (1.5±0.2)×107 is demonstrated from a benzenethiol monolayer chemisorbed on a Au-NW array substrate

AB - We present a new top-down nanofabrication technology to realize large area metal nanowire (m-NW) arrays with tunable sub-20 nm separation nanogaps without the use of chemical etching or milling of the metal layer. The nanofabrication technology is based on a self-regulating metal deposition process that is facilitated by closely spaced and isolated heterogeneous template surfaces that confines the metal deposition into two dimensions. Electrically isolated parallel arrays of m-NW can be realized with uniform and controllable nanogaps. Au-NW arrays are presented with high-density ~105 NWs cm-1, variable NW diameters down to 50 nm, variable nanogaps down to 5 nm, and very large nanogap length density ~1 km cm-2. A spatially averaged surface enhanced Raman scattering (SERS) analytical enhancement factor of (1.5±0.2)×107 is demonstrated from a benzenethiol monolayer chemisorbed on a Au-NW array substrate

KW - EWI-24118

KW - METIS-300226

KW - IR-88284

U2 - 10.1109/Transducers.2013.6626738

DO - 10.1109/Transducers.2013.6626738

M3 - Conference contribution

SN - 978-1-4673-5983-2

T3 - Transducers 2013 & Eurosensors XXVII

SP - 206

EP - 209

BT - The 17th International Conference on Solid-State Sensors, Actuators and Microsystems

PB - IEEE

CY - Barcelona

T2 - 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013

Y2 - 16 June 2013 through 20 June 2013

ER -