Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography

L. Vogelaar, W. Nijdam, Hendricus A.G.M. van Wolferen, R.M. de Ridder, Franciscus B. Segerink, E. Flück, L. Kuipers, N.F. van Hulst

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Extended photonic crystal slabs with light-guiding defects have been created by a combination of laser interference lithography (LIL) and local focused ion beam (FIB) assisted deposition. Large area, highly uniform photonic crystal slabs for visible light are thus made possible. The Figure shows a freestanding Si3N4-air photonic crystal with a light- guiding defect line running along the center of the slab (total length = 1 mm).
Original languageUndefined
Pages (from-to)1551-1554
Number of pages5
JournalAdvanced materials
Issue number20
Publication statusPublished - 2001


  • Focused ion beam (FIB)
  • METIS-202027
  • Laser interference lithography (LIL)
  • Photonic crystals
  • IR-36440

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