Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography

L. Vogelaar; W. Nijdam; Hendricus A.G.M. van Wolferen; R.M. de Ridder; Franciscus B. Segerink; E. Flück; L. Kuipers; N.F. van Hulst

doi:10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V

Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography

L. Vogelaar, W. Nijdam, Hendricus A.G.M. van Wolferen, R.M. de Ridder, Franciscus B. Segerink, E. Flück, L. Kuipers, N.F. van Hulst

Optical Sciences

Research output: Contribution to journal › Article › Academic › peer-review

85 Citations (Scopus)

314 Downloads (Pure)

Abstract

Extended photonic crystal slabs with light-guiding defects have been created by a combination of laser interference lithography (LIL) and local focused ion beam (FIB) assisted deposition. Large area, highly uniform photonic crystal slabs for visible light are thus made possible. The Figure shows a freestanding Si3N4-air photonic crystal with a light- guiding defect line running along the center of the slab (total length = 1 mm).

Original language	Undefined
Pages (from-to)	1551-1554
Number of pages	5
Journal	Advanced materials
Volume	13
Issue number	20
DOIs	https://doi.org/10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V
Publication status	Published - 2001

Keywords

Focused ion beam (FIB)
METIS-202027
Laser interference lithography (LIL)
Photonic crystals
IR-36440

Access to Document

10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V

93

Cite this

Vogelaar, L., Nijdam, W., van Wolferen, H. A. G. M., de Ridder, R. M., Segerink, F. B., Flück, E., Kuipers, L., & van Hulst, N. F. (2001). Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography. Advanced materials, 13(20), 1551-1554. https://doi.org/10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V

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title = "Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography",

abstract = "Extended photonic crystal slabs with light-guiding defects have been created by a combination of laser interference lithography (LIL) and local focused ion beam (FIB) assisted deposition. Large area, highly uniform photonic crystal slabs for visible light are thus made possible. The Figure shows a freestanding Si3N4-air photonic crystal with a light- guiding defect line running along the center of the slab (total length = 1 mm).",

keywords = "Focused ion beam (FIB), METIS-202027, Laser interference lithography (LIL), Photonic crystals, IR-36440",

author = "L. Vogelaar and W. Nijdam and {van Wolferen}, {Hendricus A.G.M.} and {de Ridder}, R.M. and Segerink, {Franciscus B.} and E. Fl{\"u}ck and L. Kuipers and {van Hulst}, N.F.",

year = "2001",

doi = "10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V",

language = "Undefined",

volume = "13",

pages = "1551--1554",

journal = "Advanced materials",

issn = "0935-9648",

publisher = "Wiley-Blackwell",

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Vogelaar, L, Nijdam, W, van Wolferen, HAGM, de Ridder, RM, Segerink, FB, Flück, E, Kuipers, L & van Hulst, NF 2001, 'Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography', Advanced materials, vol. 13, no. 20, pp. 1551-1554. https://doi.org/10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V

Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography. / Vogelaar, L.; Nijdam, W.; van Wolferen, Hendricus A.G.M. et al.
In: Advanced materials, Vol. 13, No. 20, 2001, p. 1551-1554.

Research output: Contribution to journal › Article › Academic › peer-review

TY - JOUR

T1 - Large area photonic crystal slabs for visible light with waveguiding defect structures: Fabrication with focused ion beam assisted laser interference lithography

AU - Vogelaar, L.

AU - Nijdam, W.

AU - van Wolferen, Hendricus A.G.M.

AU - de Ridder, R.M.

AU - Segerink, Franciscus B.

AU - Flück, E.

AU - Kuipers, L.

AU - van Hulst, N.F.

PY - 2001

Y1 - 2001

N2 - Extended photonic crystal slabs with light-guiding defects have been created by a combination of laser interference lithography (LIL) and local focused ion beam (FIB) assisted deposition. Large area, highly uniform photonic crystal slabs for visible light are thus made possible. The Figure shows a freestanding Si3N4-air photonic crystal with a light- guiding defect line running along the center of the slab (total length = 1 mm).

AB - Extended photonic crystal slabs with light-guiding defects have been created by a combination of laser interference lithography (LIL) and local focused ion beam (FIB) assisted deposition. Large area, highly uniform photonic crystal slabs for visible light are thus made possible. The Figure shows a freestanding Si3N4-air photonic crystal with a light- guiding defect line running along the center of the slab (total length = 1 mm).

KW - Focused ion beam (FIB)

KW - METIS-202027

KW - Laser interference lithography (LIL)

KW - Photonic crystals

KW - IR-36440

U2 - 10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V

DO - 10.1002/1521-4095(200110)13:20<1551::AID-ADMA1551>3.0.CO;2-V

M3 - Article

SN - 0935-9648

VL - 13

SP - 1551

EP - 1554

JO - Advanced materials

JF - Advanced materials

IS - 20

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