Large-area pulsed laser deposition and assembly processes for pierzoelectric MEMS devices based on all-oxide LaNiO3/Pb(Zr,Ti)O3/LaNiO3 thin films

Minh Nguyen, Matthijn Dekkers, Maarten van Zalk, Joska Broekmaat, Arjen Janssens, Hammad Nazeer, Dave Blank, Guus Rijnders

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Physics & Astronomy