Large Deflection Performance of Surface Micromachined Corrugated Diaphragms

C.J. van Mullem, K.J. Gabriel, H. Fujita

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    25 Citations (Scopus)
    100 Downloads (Pure)

    Abstract

    The large deflection performance was measured and modeled for its dependence on diaphragm geometries and corrugation parameters. Corrugated polyimide diaphragms of various diameters, corrugation frequencies, and thicknesses were fabricated using a surface micromachining technique. Current models correctly described the observed increase in deflection from corrugated diaphragms compared to deflections in flat diaphragms at equivalent loads. The models are extended with the definition of the transition deflection which delineates the transition between the small and large deflection regions. The range of corrugation quality factors available in surface micromachined diaphragms is determined, and predicted load-deflection curves are compared to measurements
    Original languageEnglish
    Title of host publicationTRANSDUCERS '91
    Subtitle of host publication1991 International Conference on Solid-State Sensors and Actuators: Digest of Technical Papers
    Place of PublicationPiscataway, NJ
    PublisherIEEE
    Pages1014-1017
    Number of pages4
    ISBN (Print)9780879425852
    DOIs
    Publication statusPublished - 24 Jun 1991
    Event1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991 - San Francisco, United States
    Duration: 24 Jun 199127 Jun 1991

    Conference

    Conference1991 International Conference on Solid-State Sensors and Actuators, TRANSDUCERS 1991
    Abbreviated titleTRANSDUCERS '91
    CountryUnited States
    CitySan Francisco
    Period24/06/9127/06/91

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