Large range multi-axis fingertip force sensor

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

3 Citations (Scopus)
1 Downloads (Pure)

Abstract

A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.
Original languageUndefined
Title of host publication17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
Place of PublicationUSA
PublisherIEEE Electron Devices Society
Pages2737-2740
Number of pages4
ISBN (Print)978-1-4673-5981-8
DOIs
Publication statusPublished - 16 Jun 2013
Event17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain
Duration: 16 Jun 201320 Jun 2013
Conference number: 17
http://www.transducers-eurosensors2013.org/

Publication series

Name
PublisherIEEE Electron Devices Society

Conference

Conference17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
Abbreviated titleTRANSDUCERS 2013
CountrySpain
CityBarcelona
Period16/06/1320/06/13
OtherHeld in conjunction with EUROSENSORS XXVII
Internet address

Keywords

  • EWI-24354
  • IR-89042
  • METIS-302668

Cite this

Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J., Ma, K., & Krijnen, G. J. M. (2013). Large range multi-axis fingertip force sensor. In 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (pp. 2737-2740). USA: IEEE Electron Devices Society. https://doi.org/10.1109/Transducers.2013.6627372
Brookhuis, Robert Anton ; Wiegerink, Remco J. ; Lammerink, Theodorus S.J. ; Ma, Kechun ; Krijnen, Gijsbertus J.M. / Large range multi-axis fingertip force sensor. 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). USA : IEEE Electron Devices Society, 2013. pp. 2737-2740
@inproceedings{427972ccaf954895b64958bdf2ff92d3,
title = "Large range multi-axis fingertip force sensor",
abstract = "A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.",
keywords = "EWI-24354, IR-89042, METIS-302668",
author = "Brookhuis, {Robert Anton} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Kechun Ma and Krijnen, {Gijsbertus J.M.}",
note = "10.1109/Transducers.2013.6627372",
year = "2013",
month = "6",
day = "16",
doi = "10.1109/Transducers.2013.6627372",
language = "Undefined",
isbn = "978-1-4673-5981-8",
publisher = "IEEE Electron Devices Society",
pages = "2737--2740",
booktitle = "17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)",
address = "United States",

}

Brookhuis, RA, Wiegerink, RJ, Lammerink, TSJ, Ma, K & Krijnen, GJM 2013, Large range multi-axis fingertip force sensor. in 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). IEEE Electron Devices Society, USA, pp. 2737-2740, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6627372

Large range multi-axis fingertip force sensor. / Brookhuis, Robert Anton; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Ma, Kechun; Krijnen, Gijsbertus J.M.

17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). USA : IEEE Electron Devices Society, 2013. p. 2737-2740.

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

TY - GEN

T1 - Large range multi-axis fingertip force sensor

AU - Brookhuis, Robert Anton

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Ma, Kechun

AU - Krijnen, Gijsbertus J.M.

N1 - 10.1109/Transducers.2013.6627372

PY - 2013/6/16

Y1 - 2013/6/16

N2 - A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.

AB - A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.

KW - EWI-24354

KW - IR-89042

KW - METIS-302668

U2 - 10.1109/Transducers.2013.6627372

DO - 10.1109/Transducers.2013.6627372

M3 - Conference contribution

SN - 978-1-4673-5981-8

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EP - 2740

BT - 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

PB - IEEE Electron Devices Society

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ER -

Brookhuis RA, Wiegerink RJ, Lammerink TSJ, Ma K, Krijnen GJM. Large range multi-axis fingertip force sensor. In 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). USA: IEEE Electron Devices Society. 2013. p. 2737-2740 https://doi.org/10.1109/Transducers.2013.6627372