Abstract
A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.
Original language | Undefined |
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Title of host publication | 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) |
Place of Publication | USA |
Publisher | IEEE |
Pages | 2737-2740 |
Number of pages | 4 |
ISBN (Print) | 978-1-4673-5981-8 |
DOIs | |
Publication status | Published - 16 Jun 2013 |
Event | 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013 Conference number: 17 http://www.transducers-eurosensors2013.org/ |
Publication series
Name | |
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Publisher | IEEE Electron Devices Society |
Conference
Conference | 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 |
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Abbreviated title | TRANSDUCERS 2013 |
Country/Territory | Spain |
City | Barcelona |
Period | 16/06/13 → 20/06/13 |
Other | Held in conjunction with EUROSENSORS XXVII |
Internet address |
Keywords
- EWI-24354
- IR-89042
- METIS-302668