Large range multi-axis fingertip force sensor

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    5 Citations (Scopus)
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    Abstract

    A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.
    Original languageUndefined
    Title of host publication17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
    Place of PublicationUSA
    PublisherIEEE Electron Devices Society
    Pages2737-2740
    Number of pages4
    ISBN (Print)978-1-4673-5981-8
    DOIs
    Publication statusPublished - 16 Jun 2013
    Event17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain
    Duration: 16 Jun 201320 Jun 2013
    Conference number: 17
    http://www.transducers-eurosensors2013.org/

    Publication series

    Name
    PublisherIEEE Electron Devices Society

    Conference

    Conference17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
    Abbreviated titleTRANSDUCERS 2013
    CountrySpain
    CityBarcelona
    Period16/06/1320/06/13
    OtherHeld in conjunction with EUROSENSORS XXVII
    Internet address

    Keywords

    • EWI-24354
    • IR-89042
    • METIS-302668

    Cite this

    Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J., Ma, K., & Krijnen, G. J. M. (2013). Large range multi-axis fingertip force sensor. In 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (pp. 2737-2740). USA: IEEE Electron Devices Society. https://doi.org/10.1109/Transducers.2013.6627372