Large range multi-axis fingertip force sensor

Robert Anton Brookhuis; Remco J. Wiegerink; Theodorus S.J. Lammerink; Kechun Ma; Gijsbertus J.M. Krijnen

doi:10.1109/Transducers.2013.6627372

Large range multi-axis fingertip force sensor

Robert Anton Brookhuis, Remco J. Wiegerink, Theodorus S.J. Lammerink, Kechun Ma, Gijsbertus J.M. Krijnen

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

8 Citations (Scopus)

9 Downloads (Pure)

Abstract

A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.

Original language	Undefined
Title of host publication	17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
Place of Publication	USA
Publisher	IEEE
Pages	2737-2740
Number of pages	4
ISBN (Print)	978-1-4673-5981-8
DOIs	https://doi.org/10.1109/Transducers.2013.6627372
Publication status	Published - 16 Jun 2013
Event	17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain Duration: 16 Jun 2013 → 20 Jun 2013 Conference number: 17 http://www.transducers-eurosensors2013.org/

Publication series

Name
Publisher	IEEE Electron Devices Society

Conference

Conference	17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
Abbreviated title	TRANSDUCERS 2013
Country/Territory	Spain
City	Barcelona
Period	16/06/13 → 20/06/13
Other	Held in conjunction with EUROSENSORS XXVII
Internet address	http://www.transducers-eurosensors2013.org/

Keywords

EWI-24354
IR-89042
METIS-302668

Access to Document

10.1109/Transducers.2013.6627372

http://eprints.eemcs.utwente.nl/secure2/24354/01/Transducers2013Robert.pdf

Cite this

@inproceedings{427972ccaf954895b64958bdf2ff92d3,

title = "Large range multi-axis fingertip force sensor",

abstract = "A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.",

keywords = "EWI-24354, IR-89042, METIS-302668",

author = "Brookhuis, {Robert Anton} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Kechun Ma and Krijnen, {Gijsbertus J.M.}",

note = "10.1109/Transducers.2013.6627372 ; 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 ; Conference date: 16-06-2013 Through 20-06-2013",

year = "2013",

month = jun,

day = "16",

doi = "10.1109/Transducers.2013.6627372",

language = "Undefined",

isbn = "978-1-4673-5981-8",

publisher = "IEEE",

pages = "2737--2740",

booktitle = "17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)",

address = "United States",

url = "http://www.transducers-eurosensors2013.org/",

}

Brookhuis, RA, Wiegerink, RJ, Lammerink, TSJ, Ma, K & Krijnen, GJM 2013, Large range multi-axis fingertip force sensor. in 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). IEEE, USA, pp. 2737-2740, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6627372

Large range multi-axis fingertip force sensor. / Brookhuis, Robert Anton; Wiegerink, Remco J.; Lammerink, Theodorus S.J. et al.
17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). USA: IEEE, 2013. p. 2737-2740.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

TY - GEN

T1 - Large range multi-axis fingertip force sensor

AU - Brookhuis, Robert Anton

AU - Wiegerink, Remco J.

AU - Lammerink, Theodorus S.J.

AU - Ma, Kechun

AU - Krijnen, Gijsbertus J.M.

N1 - Conference code: 17

PY - 2013/6/16

Y1 - 2013/6/16

N2 - A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.

AB - A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.

KW - EWI-24354

KW - IR-89042

KW - METIS-302668

U2 - 10.1109/Transducers.2013.6627372

DO - 10.1109/Transducers.2013.6627372

M3 - Conference contribution

SN - 978-1-4673-5981-8

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EP - 2740

BT - 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

PB - IEEE

CY - USA

T2 - 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013

Y2 - 16 June 2013 through 20 June 2013

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