Large range multi-axis fingertip force sensor

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    4 Citations (Scopus)
    1 Downloads (Pure)

    Abstract

    A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.
    Original languageUndefined
    Title of host publication17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)
    Place of PublicationUSA
    PublisherIEEE Electron Devices Society
    Pages2737-2740
    Number of pages4
    ISBN (Print)978-1-4673-5981-8
    DOIs
    Publication statusPublished - 16 Jun 2013
    Event17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013 - Barcelona, Spain
    Duration: 16 Jun 201320 Jun 2013
    Conference number: 17
    http://www.transducers-eurosensors2013.org/

    Publication series

    Name
    PublisherIEEE Electron Devices Society

    Conference

    Conference17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013
    Abbreviated titleTRANSDUCERS 2013
    CountrySpain
    CityBarcelona
    Period16/06/1320/06/13
    OtherHeld in conjunction with EUROSENSORS XXVII
    Internet address

    Keywords

    • EWI-24354
    • IR-89042
    • METIS-302668

    Cite this

    Brookhuis, R. A., Wiegerink, R. J., Lammerink, T. S. J., Ma, K., & Krijnen, G. J. M. (2013). Large range multi-axis fingertip force sensor. In 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) (pp. 2737-2740). USA: IEEE Electron Devices Society. https://doi.org/10.1109/Transducers.2013.6627372
    Brookhuis, Robert Anton ; Wiegerink, Remco J. ; Lammerink, Theodorus S.J. ; Ma, Kechun ; Krijnen, Gijsbertus J.M. / Large range multi-axis fingertip force sensor. 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). USA : IEEE Electron Devices Society, 2013. pp. 2737-2740
    @inproceedings{427972ccaf954895b64958bdf2ff92d3,
    title = "Large range multi-axis fingertip force sensor",
    abstract = "A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.",
    keywords = "EWI-24354, IR-89042, METIS-302668",
    author = "Brookhuis, {Robert Anton} and Wiegerink, {Remco J.} and Lammerink, {Theodorus S.J.} and Kechun Ma and Krijnen, {Gijsbertus J.M.}",
    note = "10.1109/Transducers.2013.6627372",
    year = "2013",
    month = "6",
    day = "16",
    doi = "10.1109/Transducers.2013.6627372",
    language = "Undefined",
    isbn = "978-1-4673-5981-8",
    publisher = "IEEE Electron Devices Society",
    pages = "2737--2740",
    booktitle = "17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)",
    address = "United States",

    }

    Brookhuis, RA, Wiegerink, RJ, Lammerink, TSJ, Ma, K & Krijnen, GJM 2013, Large range multi-axis fingertip force sensor. in 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). IEEE Electron Devices Society, USA, pp. 2737-2740, 17th International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2013, Barcelona, Spain, 16/06/13. https://doi.org/10.1109/Transducers.2013.6627372

    Large range multi-axis fingertip force sensor. / Brookhuis, Robert Anton; Wiegerink, Remco J.; Lammerink, Theodorus S.J.; Ma, Kechun; Krijnen, Gijsbertus J.M.

    17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). USA : IEEE Electron Devices Society, 2013. p. 2737-2740.

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    TY - GEN

    T1 - Large range multi-axis fingertip force sensor

    AU - Brookhuis, Robert Anton

    AU - Wiegerink, Remco J.

    AU - Lammerink, Theodorus S.J.

    AU - Ma, Kechun

    AU - Krijnen, Gijsbertus J.M.

    N1 - 10.1109/Transducers.2013.6627372

    PY - 2013/6/16

    Y1 - 2013/6/16

    N2 - A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.

    AB - A miniature capacitive force sensor for the measurement of shear- and normal force at the fingertip is designed and realized. The sensor has a circular design with a corrugated silicon ring around the force sensitive area. This ring provides the spring constant in shear direction and seals the interior of the sensor. Thin silicon pillars inside the sensitive area provide in-plane guidance for shear force measurement and provide the spring constant in normal direction. A novel electrode pattern results in a large shear force sensitivity. The fingertip force sensor has a force range up to 60 N in normal direction and ±30 N in shear direction.

    KW - EWI-24354

    KW - IR-89042

    KW - METIS-302668

    U2 - 10.1109/Transducers.2013.6627372

    DO - 10.1109/Transducers.2013.6627372

    M3 - Conference contribution

    SN - 978-1-4673-5981-8

    SP - 2737

    EP - 2740

    BT - 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII)

    PB - IEEE Electron Devices Society

    CY - USA

    ER -

    Brookhuis RA, Wiegerink RJ, Lammerink TSJ, Ma K, Krijnen GJM. Large range multi-axis fingertip force sensor. In 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII). USA: IEEE Electron Devices Society. 2013. p. 2737-2740 https://doi.org/10.1109/Transducers.2013.6627372