Large-scale integrated optics using TriPleXTM waveguide technology: from UV to IR

Rene Heideman; Arne Leinse; Willem Hoving; R. Dekker; D.H. Geuzebroek; E.J. Klein; Remco Stoffer; C.G.H. Roeloffzen; L. Zhuang; Arjan Meijerink

doi:10.1117/12.808409

Large-scale integrated optics using TriPleXTM waveguide technology: from UV to IR

Rene Heideman, Arne Leinse, Willem Hoving, R. Dekker, D.H. Geuzebroek, E.J. Klein, Remco Stoffer, C.G.H. Roeloffzen, L. Zhuang, Arjan Meijerink

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

39 Citations (Scopus)

Abstract

We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleXTM waveguide is basically formed by a -preferably rectangular- silicon nitride (Si3N4) shell filled with and encapsulated by silicon dioxide (SiO2). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.

Original language	Undefined
Title of host publication	Proceeding of SPIE Photonics west
Editors	Alexei L. Glebov, Ray T. Chen
Place of Publication	California
Publisher	SPIE
Pages	808409
Number of pages	15
ISBN (Print)	978-0-81947-467-4
DOIs	https://doi.org/10.1117/12.808409
Publication status	Published - 26 Jan 2009
Event	Photonics Packaging, Integration, and Interconnects IX 2009 - San Jose, CA, USA Duration: 26 Jan 2009 → 26 Jan 2009

Publication series

Name	Proceedings of SPIE
Publisher	SPIE--The International Society for Optical Engineering
Volume	7221
ISSN (Print)	1605-7422

Conference

Conference	Photonics Packaging, Integration, and Interconnects IX 2009
Period	26/01/09 → 26/01/09
Other	26 January 2009

Keywords

METIS-264052
IR
Birefringence
CMOS compatible
IR-68124
PLCs
Optical waveguides
UV
Integrated Optics
visible
EWI-16116
low loss
multilayer waveguides

Access to Document

10.1117/12.808409

http://eprints.eemcs.utwente.nl/secure2/16116/01/Invited_Large_scale_integrated_optics_using.pdf

Cite this

Heideman, R., Leinse, A., Hoving, W., Dekker, R., Geuzebroek, D. H., Klein, E. J., Stoffer, R., Roeloffzen, C. G. H., Zhuang, L., & Meijerink, A. (2009). Large-scale integrated optics using TriPleXTM waveguide technology: from UV to IR. In A. L. Glebov, & R. T. Chen (Eds.), Proceeding of SPIE Photonics west (pp. 808409). [10.1117/12.808409] (Proceedings of SPIE; Vol. 7221). SPIE. https://doi.org/10.1117/12.808409

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abstract = "We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleXTM waveguide is basically formed by a -preferably rectangular- silicon nitride (Si3N4) shell filled with and encapsulated by silicon dioxide (SiO2). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.",

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Heideman, R, Leinse, A, Hoving, W, Dekker, R, Geuzebroek, DH, Klein, EJ, Stoffer, R, Roeloffzen, CGH, Zhuang, L & Meijerink, A 2009, Large-scale integrated optics using TriPleXTM waveguide technology: from UV to IR. in AL Glebov & RT Chen (eds), Proceeding of SPIE Photonics west., 10.1117/12.808409, Proceedings of SPIE, vol. 7221, SPIE, California, pp. 808409, Photonics Packaging, Integration, and Interconnects IX 2009, 26/01/09. https://doi.org/10.1117/12.808409

Large-scale integrated optics using TriPleXTM waveguide technology: from UV to IR. / Heideman, Rene; Leinse, Arne; Hoving, Willem et al.
Proceeding of SPIE Photonics west. ed. / Alexei L. Glebov; Ray T. Chen. California: SPIE, 2009. p. 808409 10.1117/12.808409 (Proceedings of SPIE; Vol. 7221).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › Academic › peer-review

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