Large-scale integrated optics using TriPleXTM waveguide technology: from UV to IR

Rene Heideman, Arne Leinse, Willem Hoving, R. Dekker, D.H. Geuzebroek, E.J. Klein, Remco Stoffer, C.G.H. Roeloffzen, L. Zhuang, Arjan Meijerink

    Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

    39 Citations (Scopus)


    We present a new class of low-loss integrated optical waveguide structures as CMOS-compatible industrial standard for photonic integration on silicon or glass. A TriPleXTM waveguide is basically formed by a -preferably rectangular- silicon nitride (Si3N4) shell filled with and encapsulated by silicon dioxide (SiO2). The constituent materials are low-cost stoichiometric LPVCD end products which are very stable in time. Modal characteristics, birefringence, footprint size and insertion loss are controlled by design of the geometry. Several examples of new applications will be presented to demonstrate its high potential for large-scale integrated optical circuits for telecommunications, sensing and visible light applications.
    Original languageUndefined
    Title of host publicationProceeding of SPIE Photonics west
    EditorsAlexei L. Glebov, Ray T. Chen
    Place of PublicationCalifornia
    Number of pages15
    ISBN (Print)978-0-81947-467-4
    Publication statusPublished - 26 Jan 2009
    EventPhotonics Packaging, Integration, and Interconnects IX 2009 - San Jose, CA, USA
    Duration: 26 Jan 200926 Jan 2009

    Publication series

    NameProceedings of SPIE
    PublisherSPIE--The International Society for Optical Engineering
    ISSN (Print)1605-7422


    ConferencePhotonics Packaging, Integration, and Interconnects IX 2009
    Other26 January 2009


    • METIS-264052
    • IR
    • Birefringence
    • CMOS compatible
    • IR-68124
    • PLCs
    • Optical waveguides
    • UV
    • Integrated Optics
    • visible
    • EWI-16116
    • low loss
    • multilayer waveguides

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