| Original language | Undefined |
|---|---|
| Title of host publication | Proceedings of the ICALEO'03 Laser Micro Fabrication Section E (cd-rom) |
| Place of Publication | Jacksonville (FL) USA |
| Publisher | LIA |
| Pages | 66-73 |
| ISBN (Print) | 0-912035-75-7 |
| Publication status | Published - 13 Oct 2003 |
| Event | 22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003 - Jacksonville, United States Duration: 13 Oct 2003 → 16 Oct 2003 Conference number: 22 |
Conference
| Conference | 22nd International Congress on Applications of Lasers & Electro-Optics, ICALEO 2003 |
|---|---|
| Abbreviated title | ICALEO |
| Country/Territory | United States |
| City | Jacksonville |
| Period | 13/10/03 → 16/10/03 |
Keywords
- METIS-212446
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