Laser annealing of self-aligned As+ implants in contact windows for ultrashallow junction formation

C. Biasotto*, V. Gonda, L. K. Nanver, J. Van Der Cingel, V. Jovanović.

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference contributionAcademicpeer-review

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Engineering & Materials Science