Laser drilling of metals with a XeCl excimer laser

A. Schoonderbeek

Research output: ThesisPhD Thesis - Research UT, graduation UT

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This thesis is about laser drilling with a unique excimer laser with a nearly diffraction-limited beam and relatively long optical pulse duration of 175 ns. The combination of high processing speed and high processing quality suitable for industrial applications can be obtained because the excellent beam quality enables usage of the entire beam instead of using mask projection techniques, which is common for excimer lasers. The research described in this thesis contributes to the fundamental understanding of the underlying processes for drilling metals with such a novel excimer laser, which is essential to achieve the highest processing speed and to control the quality of the drilled holes.
Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • University of Twente
  • Meijer, Johannes, Supervisor
  • Boller, K.-J., Supervisor
Award date21 Jan 2005
Place of PublicationEnschede
Print ISBNs90-365-2126-2
Publication statusPublished - 21 Jan 2005


  • METIS-230078
  • IR-48273


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