Laser drilling of metals with a XeCl excimer laser

A. Schoonderbeek

Research output: ThesisPhD Thesis - Research UT, graduation UT

71 Downloads (Pure)

Abstract

This thesis is about laser drilling with a unique excimer laser with a nearly diffraction-limited beam and relatively long optical pulse duration of 175 ns. The combination of high processing speed and high processing quality suitable for industrial applications can be obtained because the excellent beam quality enables usage of the entire beam instead of using mask projection techniques, which is common for excimer lasers. The research described in this thesis contributes to the fundamental understanding of the underlying processes for drilling metals with such a novel excimer laser, which is essential to achieve the highest processing speed and to control the quality of the drilled holes.
Original languageEnglish
Awarding Institution
  • University of Twente
Supervisors/Advisors
  • Meijer, Johannes , Supervisor
  • Boller, K.-J., Supervisor
Award date21 Jan 2005
Place of PublicationEnschede
Publisher
Print ISBNs90-365-2126-2
Publication statusPublished - 21 Jan 2005

Fingerprint

laser drilling
excimer lasers
metals
speed control
theses
drilling
pulse duration
masks
projection
diffraction

Keywords

  • METIS-230078
  • IR-48273

Cite this

Schoonderbeek, A. (2005). Laser drilling of metals with a XeCl excimer laser. Enschede: Universiteit Twente.
Schoonderbeek, A.. / Laser drilling of metals with a XeCl excimer laser. Enschede : Universiteit Twente, 2005. 131 p.
@phdthesis{5d02a09d5f3b40739c19f8e5ab00375e,
title = "Laser drilling of metals with a XeCl excimer laser",
abstract = "This thesis is about laser drilling with a unique excimer laser with a nearly diffraction-limited beam and relatively long optical pulse duration of 175 ns. The combination of high processing speed and high processing quality suitable for industrial applications can be obtained because the excellent beam quality enables usage of the entire beam instead of using mask projection techniques, which is common for excimer lasers. The research described in this thesis contributes to the fundamental understanding of the underlying processes for drilling metals with such a novel excimer laser, which is essential to achieve the highest processing speed and to control the quality of the drilled holes.",
keywords = "METIS-230078, IR-48273",
author = "A. Schoonderbeek",
year = "2005",
month = "1",
day = "21",
language = "English",
isbn = "90-365-2126-2",
publisher = "Universiteit Twente",
school = "University of Twente",

}

Schoonderbeek, A 2005, 'Laser drilling of metals with a XeCl excimer laser', University of Twente, Enschede.

Laser drilling of metals with a XeCl excimer laser. / Schoonderbeek, A.

Enschede : Universiteit Twente, 2005. 131 p.

Research output: ThesisPhD Thesis - Research UT, graduation UT

TY - THES

T1 - Laser drilling of metals with a XeCl excimer laser

AU - Schoonderbeek, A.

PY - 2005/1/21

Y1 - 2005/1/21

N2 - This thesis is about laser drilling with a unique excimer laser with a nearly diffraction-limited beam and relatively long optical pulse duration of 175 ns. The combination of high processing speed and high processing quality suitable for industrial applications can be obtained because the excellent beam quality enables usage of the entire beam instead of using mask projection techniques, which is common for excimer lasers. The research described in this thesis contributes to the fundamental understanding of the underlying processes for drilling metals with such a novel excimer laser, which is essential to achieve the highest processing speed and to control the quality of the drilled holes.

AB - This thesis is about laser drilling with a unique excimer laser with a nearly diffraction-limited beam and relatively long optical pulse duration of 175 ns. The combination of high processing speed and high processing quality suitable for industrial applications can be obtained because the excellent beam quality enables usage of the entire beam instead of using mask projection techniques, which is common for excimer lasers. The research described in this thesis contributes to the fundamental understanding of the underlying processes for drilling metals with such a novel excimer laser, which is essential to achieve the highest processing speed and to control the quality of the drilled holes.

KW - METIS-230078

KW - IR-48273

M3 - PhD Thesis - Research UT, graduation UT

SN - 90-365-2126-2

PB - Universiteit Twente

CY - Enschede

ER -

Schoonderbeek A. Laser drilling of metals with a XeCl excimer laser. Enschede: Universiteit Twente, 2005. 131 p.