Laser gain measurements at 193 nm in a small discharge cell containing ArF excimer laser gas mixtures

A.V. Azarov, P.J.M. Peters, Klaus J. Boller

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Spatial and temporal gain profiles as well as the peak net gain at 193 nm have been measured in X-ray preionized discharges excited by a single pulse electrical system working in the charge transfer mode. Ar- and F2-containing laser gas mixtures with He or Ne as a buffer gas have been used. With a pumping pulse duration of ~ 100 ns (FWHM) and a specific peak power deposition of ~ 1 MW cm-3 bar-1 in a gas mixture containing F2 : Ar : He (0.1%:5%:94.9%), at 2 bar total pressure, a very high peak net gain coefficient of ~30% cm-1 was measured in the gas discharge. The FWHM of the gain waveform was ~ 60 ns
Original languageUndefined
Pages (from-to)455-460
Number of pages6
JournalApplied physics B: Lasers and optics
VolumeB 90
Issue number3-4
Publication statusPublished - 2008


  • IR-59961
  • METIS-244488

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