Laser impact on a drop

Alexander Ludwig Klein, C.W. Visser, W. Bouwhuis, H.E. Lhuissier, Jacobus Hendrikus Snoeijer, E. Villermaux, Detlef Lohse, Hanneke Gelderblom

Research output: Non-textual formDigital or Visual ProductsOther research output

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Abstract

The energy deposition in a liquid drop on a nanosecond time scale by impact of a laser pulse can induce various reactions, such as vaporization or plasma generation. The response of the drop can be extremely violent: The drop gets strongly deformed and propelled forward at several m/s, and subsequently breaks up or even explodes. These effects are used in a controlled manner during the generation of extreme ultraviolet (EUV) light in nanolithography machines for the fabrication of leading-edge semiconductor microchips. Detailed understanding of the fundamentals of this process is of key importance in order to advance the latest lithography machines. - See more at: http://gfm.aps.org/meetings/dfd-2014/5408ec6e69702d07711b0200#sthash.26qTrDD5.dpuf
Original languageEnglish
PublisherAmerican Physical Society
Publication statusPublished - 2014
Event67th Annual Meeting of the APS Division of Fluid Dynamics, APS-DFD 2014 - San Francisco, United States
Duration: 23 Nov 201425 Nov 2014
Conference number: 67

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plasma generators
leading edges
ultraviolet radiation
lasers
lithography
fabrication
pulses
energy

Keywords

  • IR-95082
  • METIS-308404

Cite this

Klein, A. L. (Author), Visser, C. W. (Author), Bouwhuis, W. (Author), Lhuissier, H. E. (Author), Snoeijer, J. H. (Author), Villermaux, E. (Author), ... Gelderblom, H. (Author). (2014). Laser impact on a drop. Digital or Visual Products, American Physical Society. Retrieved from http://gfm.aps.org/meetings/dfd-2014/5408ec6e69702d07711b0200
Klein, Alexander Ludwig (Author) ; Visser, C.W. (Author) ; Bouwhuis, W. (Author) ; Lhuissier, H.E. (Author) ; Snoeijer, Jacobus Hendrikus (Author) ; Villermaux, E. (Author) ; Lohse, Detlef (Author) ; Gelderblom, Hanneke (Author). / Laser impact on a drop. [Digital or Visual Products].
@misc{679a2520da4447b9925379864652c6d0,
title = "Laser impact on a drop",
abstract = "The energy deposition in a liquid drop on a nanosecond time scale by impact of a laser pulse can induce various reactions, such as vaporization or plasma generation. The response of the drop can be extremely violent: The drop gets strongly deformed and propelled forward at several m/s, and subsequently breaks up or even explodes. These effects are used in a controlled manner during the generation of extreme ultraviolet (EUV) light in nanolithography machines for the fabrication of leading-edge semiconductor microchips. Detailed understanding of the fundamentals of this process is of key importance in order to advance the latest lithography machines. - See more at: http://gfm.aps.org/meetings/dfd-2014/5408ec6e69702d07711b0200#sthash.26qTrDD5.dpuf",
keywords = "IR-95082, METIS-308404",
author = "Klein, {Alexander Ludwig} and C.W. Visser and W. Bouwhuis and H.E. Lhuissier and Snoeijer, {Jacobus Hendrikus} and E. Villermaux and Detlef Lohse and Hanneke Gelderblom",
note = "winning entry Gallery of Fluid Motion",
year = "2014",
language = "English",
publisher = "American Physical Society",
address = "United States",

}

Klein, AL, Visser, CW, Bouwhuis, W, Lhuissier, HE, Snoeijer, JH, Villermaux, E, Lohse, D & Gelderblom, H, Laser impact on a drop, 2014, Digital or Visual Products, American Physical Society.
Laser impact on a drop. Klein, Alexander Ludwig (Author); Visser, C.W. (Author); Bouwhuis, W. (Author); Lhuissier, H.E. (Author); Snoeijer, Jacobus Hendrikus (Author); Villermaux, E. (Author); Lohse, Detlef (Author); Gelderblom, Hanneke (Author). 2014. American Physical SocietyEvent: 67th Annual Meeting of the APS Division of Fluid Dynamics, APS-DFD 2014, San Francisco, United States.

Research output: Non-textual formDigital or Visual ProductsOther research output

TY - ADVS

T1 - Laser impact on a drop

AU - Klein, Alexander Ludwig

AU - Visser, C.W.

AU - Bouwhuis, W.

AU - Lhuissier, H.E.

AU - Snoeijer, Jacobus Hendrikus

AU - Villermaux, E.

AU - Lohse, Detlef

AU - Gelderblom, Hanneke

N1 - winning entry Gallery of Fluid Motion

PY - 2014

Y1 - 2014

N2 - The energy deposition in a liquid drop on a nanosecond time scale by impact of a laser pulse can induce various reactions, such as vaporization or plasma generation. The response of the drop can be extremely violent: The drop gets strongly deformed and propelled forward at several m/s, and subsequently breaks up or even explodes. These effects are used in a controlled manner during the generation of extreme ultraviolet (EUV) light in nanolithography machines for the fabrication of leading-edge semiconductor microchips. Detailed understanding of the fundamentals of this process is of key importance in order to advance the latest lithography machines. - See more at: http://gfm.aps.org/meetings/dfd-2014/5408ec6e69702d07711b0200#sthash.26qTrDD5.dpuf

AB - The energy deposition in a liquid drop on a nanosecond time scale by impact of a laser pulse can induce various reactions, such as vaporization or plasma generation. The response of the drop can be extremely violent: The drop gets strongly deformed and propelled forward at several m/s, and subsequently breaks up or even explodes. These effects are used in a controlled manner during the generation of extreme ultraviolet (EUV) light in nanolithography machines for the fabrication of leading-edge semiconductor microchips. Detailed understanding of the fundamentals of this process is of key importance in order to advance the latest lithography machines. - See more at: http://gfm.aps.org/meetings/dfd-2014/5408ec6e69702d07711b0200#sthash.26qTrDD5.dpuf

KW - IR-95082

KW - METIS-308404

M3 - Digital or Visual Products

PB - American Physical Society

ER -

Klein AL (Author), Visser CW (Author), Bouwhuis W (Author), Lhuissier HE (Author), Snoeijer JH (Author), Villermaux E (Author) et al. Laser impact on a drop American Physical Society. 2014.