Laser-induced backward transfer of nanoimprinted polymer elements

Matthias Feinaeugle*, Daniel J. Heath, Benjamin Mills, James A. Grant-Jacob, Goran Z. Mashanovich, Robert W. Eason

*Corresponding author for this work

Research output: Contribution to journalArticleAcademicpeer-review

22 Citations (Scopus)
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Femtosecond laser-induced backward transfer of transparent photopolymers is demonstrated in the solid state, assisted by a digital micromirror spatial light modulator for producing shaped deposits. Through use of an absorbing silicon carrier substrate, we have been able to successfully transfer solid-phase material, with lateral dimensions as small as ~6 µm. In addition, a carrier of silicon incorporating a photonic waveguide relief structure enables the transfer of imprinted deposits that have been accomplished with surface features exactly complementing those present on the substrate, with an observed minimum feature size of 140 nm.

Original languageEnglish
Article number398
JournalApplied physics A: Materials science and processing
Issue number4
Publication statusPublished - 1 Apr 2016
Externally publishedYes


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