TY - JOUR
T1 - Laser-induced backward transfer of nanoimprinted polymer elements
AU - Feinaeugle, Matthias
AU - Heath, Daniel J.
AU - Mills, Benjamin
AU - Grant-Jacob, James A.
AU - Mashanovich, Goran Z.
AU - Eason, Robert W.
PY - 2016/4/1
Y1 - 2016/4/1
N2 - Femtosecond laser-induced backward transfer of transparent photopolymers is demonstrated in the solid state, assisted by a digital micromirror spatial light modulator for producing shaped deposits. Through use of an absorbing silicon carrier substrate, we have been able to successfully transfer solid-phase material, with lateral dimensions as small as ~6 µm. In addition, a carrier of silicon incorporating a photonic waveguide relief structure enables the transfer of imprinted deposits that have been accomplished with surface features exactly complementing those present on the substrate, with an observed minimum feature size of 140 nm.
AB - Femtosecond laser-induced backward transfer of transparent photopolymers is demonstrated in the solid state, assisted by a digital micromirror spatial light modulator for producing shaped deposits. Through use of an absorbing silicon carrier substrate, we have been able to successfully transfer solid-phase material, with lateral dimensions as small as ~6 µm. In addition, a carrier of silicon incorporating a photonic waveguide relief structure enables the transfer of imprinted deposits that have been accomplished with surface features exactly complementing those present on the substrate, with an observed minimum feature size of 140 nm.
UR - https://www.scopus.com/pages/publications/84961226620
U2 - 10.1007/s00339-016-9953-6
DO - 10.1007/s00339-016-9953-6
M3 - Article
AN - SCOPUS:84961226620
SN - 0947-8396
VL - 122
JO - Applied physics A: Materials science and processing
JF - Applied physics A: Materials science and processing
IS - 4
M1 - 398
ER -