Laser-induced chemical vapor deposition of titanium didoribe

J. Elders, J.D.W. van Voorst

    Research output: Contribution to journalArticleAcademicpeer-review

    12 Citations (Scopus)
    Original languageUndefined
    Pages (from-to)553-562
    JournalJournal of Applied Physics
    Issue number54
    Publication statusPublished - 1994

    Keywords

    • METIS-111580

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